Title:
TRANSFER APPARATUS AND CERAMIC MEMBER
Document Type and Number:
WIPO Patent Application WO/2013/132803
Kind Code:
A1
Abstract:
A ceramic member (200) is provided with: a plurality of ceramic layers (291-297), which have insulating characteristics, and which are integrally fired; attracting electrodes (372, 374, 376, 378), which are formed on a first ceramic layer (296), and which are configured such that the electrodes can attract dielectric material with an electrostatic force; power supply ports (312, 316), which receive power supply with respect to the attracting electrodes (372, 374, 376, 378) from the outside of the ceramic member (200); lands (332, 336), i.e., conductive bodies, which are formed on a second ceramic layer (295), and which are configured such that the conductive bodies can receive power through the power supply ports; and vias (352, 354, 356, 358), i.e., conductive bodies, which penetrate at least one of the ceramic layers, and which electrically connect the attracting electrodes (372, 374, 376, 378), and the lands (332, 336) to each other.
Inventors:
MIWA KANAME (JP)
NIWA TOMONORI (JP)
KURANO JUN (JP)
NIWA TOMONORI (JP)
KURANO JUN (JP)
Application Number:
PCT/JP2013/001244
Publication Date:
September 12, 2013
Filing Date:
February 28, 2013
Export Citation:
Assignee:
NGK SPARK PLUG CO (JP)
International Classes:
H01L21/677; B25J15/06; H01L21/683; H02N13/00
Foreign References:
| JP2007053405A | 2007-03-01 | |||
| JPH09213455A | 1997-08-15 | |||
| JPH10242256A | 1998-09-11 | |||
| JPH10326823A | 1998-12-08 | |||
| JP2011077288A | 2011-04-14 | |||
| JPH09223729A | 1997-08-26 | |||
| JP2005197391A | 2005-07-21 |
Attorney, Agent or Firm:
TOKKYO GYOMUHOJIN MEISEI INTERNATIONAL PATENT FIRM (JP)
Patent business corporation Akinari international patent firm (JP)
Patent business corporation Akinari international patent firm (JP)
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Claims: