Title:
TRANSFER APPARATUS AND METHOD, AND COMPUTER PROGRAM
Document Type and Number:
WIPO Patent Application WO/2011/118006
Kind Code:
A1
Abstract:
Disclosed is a transfer apparatus (1) which transfers a pattern formed on a mold (200a) to a subject to which the pattern is to be transferred (300). The transfer apparatus is provided with: mold holding means (154a, 153a) which hold the mold; subject holding means (120a, 120b) which hold the subject to which the pattern is to be transferred; mold-releasing means (104, 120a) which perform mold-releasing with respect to the adhered mold and the subject; and a cancel control means (102) which supplies cancel signals for cancelling holding of the subject to the mold holding means and/or the subject holding means in the case where mold-releasing is not completed.
Inventors:
IMAI, Tetsuya (Sougou Kenkyusho. 1-2 Fujimi 6-chome, Tsurugashima-sh, Saitama 88, 〒3502288, JP)
Application Number:
JP2010/055249
Publication Date:
September 29, 2011
Filing Date:
March 25, 2010
Export Citation:
Assignee:
PIONEER CORPORATION (1-1 Shin-ogura, Saiwai-ku Kawasaki-sh, Kanagawa 31, 〒2120031, JP)
パイオニア株式会社 (〒31 神奈川県川崎市幸区新小倉１番１号 Kanagawa, 〒2120031, JP)
パイオニア株式会社 (〒31 神奈川県川崎市幸区新小倉１番１号 Kanagawa, 〒2120031, JP)
International Classes:
B29C59/02; B29C33/30; B29C33/44; H01L21/027; G11B5/84; G11B7/26
Attorney, Agent or Firm:
EGAMI, Tatsuo et al. (3rd Floor Oak Building Kyobashi, 16-10, Kyobashi 1-chome, Chuou-k, Tokyo 31, 〒1040031, JP)
Download PDF:
Claims:
Previous Patent: TRANSFER APPARATUS AND METHOD, AND COMPUTER PROGRAM
Next Patent: DATA TRANSMISSION DEVICE
Next Patent: DATA TRANSMISSION DEVICE