Title:
TRANSFER APPARATUS FOR PREVENTING LEAKAGE OF TOXIC COMBUSTIBLE SEMICONDUCTOR SPECIAL GAS
Document Type and Number:
WIPO Patent Application WO/2021/206237
Kind Code:
A1
Abstract:
The present invention comprises: a transfer cart having a seating plate on which a plurality of gas containers can be securely seated, and having a wheel member to enable a worker to hold and transfer a frame member supported by the seating plate; a stopper device which is installed to surround a valve of the gas container and prevents the diffusion of a special gas into the air when the special gas leaks from the valve; an auxiliary container seated on the seating plate and filled with nitrogen gas to supply nitrogen gas into the stopper device; a scrubber which adsorbs and purifies harmful components contained in the special gas while discharging, to the outside of the stopper device, a special gas that is lost into the stopper device and thus increases the pressure inside the stopper device; and a connecting part connecting the stopper device to the auxiliary container and connecting the stopper device to the scrubber.
Inventors:
KONG WON SECK (KR)
Application Number:
PCT/KR2020/012562
Publication Date:
October 14, 2021
Filing Date:
September 17, 2020
Export Citation:
Assignee:
WIC CO LTD (KR)
International Classes:
F17C13/08; F17C13/06; H01L21/67
Foreign References:
| US5086804A | 1992-02-11 | |||
| DE10359313B3 | 2005-07-14 | |||
| KR100907697B1 | 2009-07-14 | |||
| KR101724687B1 | 2017-04-07 | |||
| KR20190104760A | 2019-09-11 |
Attorney, Agent or Firm:
DOOSUNG PATENT LAW FIRM (KR)
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