TRANSFER APPARATUS AND PROCESSING APPARATUS

WIPO Patent Application WO/2011/158444

A1

Disclosed is a transfer apparatus wherein a possibility of cable disconnection is eliminated, and highly accurate operation alignment or the like is performed. Also disclosed is a processing apparatus. In the transfer apparatus (3), at positions at a distance from holding sections (18) formed on the hand (16) of a transfer robot (8), first and second electrodes (9a, 9b) are disposed by means of supporting members (10a, 10b). Then, an electric field is applied to the functional adhesive elements (19) of the holding sections (18) via the electrodes. Since there is no need to provide the transfer robot (8) with the electrodes, there is no dragging of cables connected to the electrodes when the transfer robot (8) is being operated. Furthermore, since there is no need to provide the transfer robot (8) with a power supply, the transfer robot (8) is not increased in size and weight. As a result, the possibility of cable disconnection is eliminated, and highly accurate operation alignment and the like can be achieved by means of the transfer apparatus (3).

JP2004122253	CARRIER DEVICE
JP2006339574	SUBSTRATE INSPECTION DEVICE
JP01281744	ETCHING DEVICE

MUSHA, Kazuhiro (INC. 2500 Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
武者　　和博 (〒43 神奈川県茅ヶ崎市萩園２５００番地株式会社アルバック内 Kanagawa, 〒2538543, JP)

JP2011/003023

December 22, 2011

May 31, 2011

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ULVAC, INC. (2500 Hagisono, Chigasaki-shi Kanagawa, 43, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００番地 Kanagawa, 〒2538543, JP)
MUSHA, Kazuhiro (INC. 2500 Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)

H01L21/677; B65G49/07

OMORI, Junichi (2nd Floor U&M Akasaka Bldg, 7-5-47 Akasaka Minato-k, Tokyo 52, 〒1070052, JP)

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