TRANSFER DEVICE AND METHOD, AND COMPUTER PROGRAM

Title:

TRANSFER DEVICE AND METHOD, AND COMPUTER PROGRAM

Document Type and Number:

WIPO Patent Application WO/2011/141996

Kind Code:

A1

Abstract:

Disclosed is a transfer device (1) for transferring a pattern formed on a mold (200a) to a transfer reception body (300), wherein the transfer device is provided with a first mold holding means (154a) which holds the mold by a first contact surface (Sa1), a second mold holding means (150a) which holds the mold by a second contact surface (Sa2), and a transfer means (104) which transfers the pattern to the transfer reception body, and wherein relative positions of the first mold holding means and the second mold holding means change in the direction perpendicular to the first contact surface.

Inventors:

IMAI, Tetsuya (Sougou Kenkyusho. 1-2 Fujimi 6-chome, Tsurugashima-sh, Saitama 88, 〒3502288, JP)
今井　哲也 (〒88 埼玉県鶴ヶ島市富士見６丁目１番２号　パイオニア株式会社　総合研究所内 Saitama, 〒3502288, JP)
KOJIMA, Yoshiaki (Sougou Kenkyusho. 1-2 Fujimi 6-chome, Tsurugashima-sh, Saitama 88, 〒3502288, JP)

Application Number:

JP2010/057953

Publication Date:

November 17, 2011

Filing Date:

May 11, 2010

Export Citation:

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Assignee:

PIONEER CORPORATION (1-1 Shin-ogura, Saiwai-kuKawasaki-shi, Kanagawa 31, 〒2120031, JP)
パイオニア株式会社 (〒31 神奈川県川崎市幸区新小倉１番１号 Kanagawa, 〒2120031, JP)
IMAI, Tetsuya (Sougou Kenkyusho. 1-2 Fujimi 6-chome, Tsurugashima-sh, Saitama 88, 〒3502288, JP)
今井　哲也 (〒88 埼玉県鶴ヶ島市富士見６丁目１番２号　パイオニア株式会社　総合研究所内 Saitama, 〒3502288, JP)

International Classes:

B29C59/02; B29C33/30; H01L21/027

Attorney, Agent or Firm:

EGAMI, Tatsuo et al. (3rd Floor Oak Building Kyobashi, 16-10, Kyobashi 1-chome, Chuou-k, Tokyo 31, 〒1040031, JP)

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