Title:
TRANSFER DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/155035
Kind Code:
A1
Abstract:
Disclosed is a transfer device (1) that transfers a pattern formed on a mold (200) to an object to which the pattern is to be transferred (300). The transfer device comprises a first stage (150a), a second stage (150b), a plurality of shafts (101a to 101d) provided between the first stage and the second stage, and first clamps (153a) provided on the first stage and that grip the mold. The first clamps are positioned outside a predetermined region that connects a central region of a pressurizing surface, which is the central region of the pressurizing surface of the mold during transfer, and the shafts. This configuration enables the stress to be concentrated locally inside the mold during pattern transfer, which suitably prevents mold damage.
Inventors:
IMAI, Tetsuya (Sougou Kenkyusho. 1-2 Fujimi 6-chome, Tsurugashima-sh, Saitama 88, 〒3502288, JP)
今井 哲也 (〒88 埼玉県鶴ヶ島市富士見６丁目１番２号 パイオニア株式会社 総合研究所内 Saitama, 〒3502288, JP)
KOJIMA, Yoshiaki (Sougou Kenkyusho. 1-2 Fujimi 6-chome, Tsurugashima-sh, Saitama 88, 〒3502288, JP)
今井 哲也 (〒88 埼玉県鶴ヶ島市富士見６丁目１番２号 パイオニア株式会社 総合研究所内 Saitama, 〒3502288, JP)
KOJIMA, Yoshiaki (Sougou Kenkyusho. 1-2 Fujimi 6-chome, Tsurugashima-sh, Saitama 88, 〒3502288, JP)
Application Number:
JP2010/059782
Publication Date:
December 15, 2011
Filing Date:
June 09, 2010
Export Citation:
Assignee:
PIONEER CORPORATION (1-1 Shin-ogura, Saiwai-kuKawasaki-shi, Kanagawa 31, 〒2120031, JP)
パイオニア株式会社 (〒31 神奈川県川崎市幸区新小倉１番１号 Kanagawa, 〒2120031, JP)
IMAI, Tetsuya (Sougou Kenkyusho. 1-2 Fujimi 6-chome, Tsurugashima-sh, Saitama 88, 〒3502288, JP)
今井 哲也 (〒88 埼玉県鶴ヶ島市富士見６丁目１番２号 パイオニア株式会社 総合研究所内 Saitama, 〒3502288, JP)
パイオニア株式会社 (〒31 神奈川県川崎市幸区新小倉１番１号 Kanagawa, 〒2120031, JP)
IMAI, Tetsuya (Sougou Kenkyusho. 1-2 Fujimi 6-chome, Tsurugashima-sh, Saitama 88, 〒3502288, JP)
今井 哲也 (〒88 埼玉県鶴ヶ島市富士見６丁目１番２号 パイオニア株式会社 総合研究所内 Saitama, 〒3502288, JP)
International Classes:
B29C59/02; B29C33/30; G11B7/26; H01L21/027; G11B5/84
Attorney, Agent or Firm:
EGAMI, Tatsuo et al. (3rd Floor Oak Building Kyobashi, 16-10, Kyobashi 1-chome, Chuou-k, Tokyo 31, 〒1040031, JP)
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Claims: