Title:
TRANSFER ROLLER AND SUBSTRATE TRANSFER APPARATUS
Document Type and Number:
WIPO Patent Application WO/2008/029680
Kind Code:
A1
Abstract:
[PROBLEMS] To provide a transfer roller having stable transfer performance
and to provide a substrate transfer apparatus. [MEANS FOR SOLVING PROBLEMS]
Provided is a substrate transfer apparatus to be used in an inline substrate
processing system wherein various types of processings are performed while
transferring various types of substrates (3) by transfer rollers (4). The substrate
transfer apparatus is provided with a plurality of transfer rollers (4) arranged
at prescribed intervals along the substrate transfer direction; chambers (60,
62a, 62b) partially surrounding the transfer rollers; a drive mechanism (70)
connected to the transfer rollers for transmitting rotary drive power to the
substrate transfer rollers; and a levelness adjusting mechanism (71) connected
to the transfer rollers for adjusting levelness of the transfer rollers. The
levelness adjusting mechanism and the rotary driving mechanism for the transfer
rollers are positioned outside of the chambers, and levelness of the transfer
rollers is adjusted from the outside of the chambers.
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Inventors:
SHIMAI, Futoshi (150, Nakamaruko, Nakahara-ku, Kawasaki-sh, Kanagawa 12, 2110012, JP)
Application Number:
JP2007/066728
Publication Date:
March 13, 2008
Filing Date:
August 29, 2007
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO., LTD. (150 Nakamaruko, Nakahara-ku Kawasaki-sh, Kanagawa 12, 2110012, JP)
東京応化工業株式会社 (〒12 神奈川県川崎市中原区中丸子１５０番地 Kanagawa, 2110012, JP)
東京応化工業株式会社 (〒12 神奈川県川崎市中原区中丸子１５０番地 Kanagawa, 2110012, JP)
International Classes:
B65G39/04; B65G13/04; B65G39/12; B65G49/06; B65G49/07; H01L21/677
Attorney, Agent or Firm:
KOYAMA, Yuu (4th Floor, Furuya Bldg.3-29, Kioicho, Chiyoda-k, Tokyo 94, 1020094, JP)
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