Title:
TRANSFER TOOL AND DEVICE HANDLER COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2022/191547
Kind Code:
A1
Abstract:
The present invention relates to a device handler and, more specifically, to a transfer tool for picking up and transferring a device for inspection, classification and the like of the device, and a device handle comprising same. Disclosed in the present invention is the transfer tool comprising: a support body unit (400) provided on the device handler to transfer a device (1) from a pick-up location to a placement location; a plurality of pick-up units (100) disposed so as to have an X-axis direction interval (ΔX) on the support body unit (400), and for picking up the device (1); a plurality of Z-axis direction moving units (300) provided so as to be movable in the X-axis direction with respect to the body unit (400), and for respectively moving the pick-up units (100) in the Z-axis direction; and an X-axis direction pitch adjusting unit (200) provided on the support body unit (400) and for moving the plurality of Z-axis direction moving units (300) in the X-axis direction so as to adjust the X-axis direction interval (ΔX) by moving the pick-up units (100) in the X-axis direction, wherein each Z-axis direction moving units (300): is provided on the support body unit (400) so as to move in the X-axis direction by means of the X-axis direction pitch adjusting unit (200); and, in order to move the pick-up units (100) in the Z-axis direction, comprises a base part (310) and a linear driving part (320) coupled to the base part (310) to linearly drive the pick-up units (100) in the Z-axis direction in accordance with a control signal of a controller.
Inventors:
YOU HONG JUN (KR)
LEE YONG SIK (KR)
LEE YONG SIK (KR)
Application Number:
PCT/KR2022/003199
Publication Date:
September 15, 2022
Filing Date:
March 07, 2022
Export Citation:
Assignee:
JT CORP (KR)
International Classes:
H01L21/677; B65G47/91; G01R31/28; H01L21/67
Foreign References:
| KR100822995B1 | 2008-04-16 | |||
| KR102068661B1 | 2020-01-21 | |||
| JP2014195971A | 2014-10-16 | |||
| KR100908496B1 | 2009-08-04 | |||
| KR20130061836A | 2013-06-12 |
Attorney, Agent or Firm:
B&IP-JOOWON PATENT AND LAW FIRM (KR)
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