Title:
TRANSFER VEHICLE SYSTEM
Document Type and Number:
WIPO Patent Application WO/2011/083525
Kind Code:
A1
Abstract:
Disclosed is a transfer vehicle system (1) which is provided with a transfer vehicle (3), a CW sensor (57), and a manufacture controller (21). The transfer vehicle (3) transfers, among a plurality of apparatuses, carriers (49) that respectively have substrates (50) therein. The CW sensor (57) detects the states of the substrates (50) in the carriers (49). The manufacture controller (21) controls the transfer performed by the transfer vehicle (3), and when an abnormality signal is inputted from the CW sensor (57), the manufacture controller makes the transfer vehicle (3) stop transferring the carriers (49).
Inventors:
YAMAMOTO MAKOTO (JP)
TOKUMOTO MITSUYA (JP)
TOKUMOTO MITSUYA (JP)
Application Number:
PCT/JP2010/006037
Publication Date:
July 14, 2011
Filing Date:
October 08, 2010
Export Citation:
Assignee:
MURATEC AUTOMATION CO LTD (JP)
YAMAMOTO MAKOTO (JP)
TOKUMOTO MITSUYA (JP)
YAMAMOTO MAKOTO (JP)
TOKUMOTO MITSUYA (JP)
International Classes:
B65G1/00; H01L21/677
Foreign References:
| JP2003237941A | 2003-08-27 | |||
| JPH07206117A | 1995-08-08 | |||
| JPH09181032A | 1997-07-11 | |||
| JP2006156740A | 2006-06-15 |
Attorney, Agent or Firm:
Shinjyu Global IP (JP)
fresh green -- a global IP patent business corporation (JP)
fresh green -- a global IP patent business corporation (JP)
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