Title:
TRANSITION METAL NITRIDE MATERIAL HAVING ADJUSTABLE HIGH WORK FUNCTION, PREPARATION METHOD THEREFOR, AND APPLICATION THEREOF
Document Type and Number:
WIPO Patent Application WO/2019/127849
Kind Code:
A1
Abstract:
A transition metal nitride material having an adjustable high work function, a preparation method therefor, and an application thereof. The preparation method comprises: sequentially growing a transition metal nitride, boron nitride, or graphite on a p-type semiconductor material as a substrate; and performing high-temperature annealing on the obtained boron nitride or graphite/transition metal nitride composite structural material, such that elemental boron in the boron nitride or elemental carbon in the graphite is thermally diffused into the transition metal nitride, to obtain a transition metal nitride material having an adjustable high work function. The obtained transition metal nitride material is doped with elemental B or C, and has a work function greater than 5 ev. The preparation process is simple, efficient, easy to control, and easy to implement on a large scale. The work function is conveniently controlled, and maximizes matching between the work functions of transition metal nitrides and P-type wide band gap semiconductor materials.
More Like This:
Inventors:
JIANG CHUNPING (CN)
LI YUXIONG (CN)
GU CHENGYAN (CN)
SUI ZHANPENG (CN)
LIU FENGFENG (CN)
LI YUXIONG (CN)
GU CHENGYAN (CN)
SUI ZHANPENG (CN)
LIU FENGFENG (CN)
Application Number:
PCT/CN2018/075415
Publication Date:
July 04, 2019
Filing Date:
February 06, 2018
Export Citation:
Assignee:
SUZHOU INST NANO TECH & NANO BIONICS SINANO CAS (CN)
International Classes:
C23C8/64; C23C8/68; H01L21/28; H01L29/45; H01L33/40
Foreign References:
US20170358670A1 | 2017-12-14 | |||
US20050059198A1 | 2005-03-17 | |||
CN1866564A | 2006-11-22 | |||
US20170330950A1 | 2017-11-16 | |||
CN1812054A | 2006-08-02 | |||
CN107034433A | 2017-08-11 | |||
CN102668040A | 2012-09-12 |
Attorney, Agent or Firm:
NANJING LI&FENG INTELLECTUAL PROPERTY AGENCY (SPECIAL GENERAL PARTNERSHIP) (CN)
Download PDF:
Previous Patent: UNDERWRITING METHOD, UNDERWRITING DEVICE, INSURANCE VERIFICATIONI AND STORAGE MEDIUM
Next Patent: ELECTROMAGNETIC CLUTCH
Next Patent: ELECTROMAGNETIC CLUTCH