Title:
TRANSMISSION INTERFERENCE MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2011/149001
Kind Code:
A1
Abstract:
Disclosed is a transmission interference microscope that provides a degree of freedom to a region being observed while obtaining pure transmission information, and obtains highly-accurate interference images at high magnification under optimized radiation conditions. An electron beam emitted from an electron source (1) is split by a biprism (11) positioned under a converging lens (3), and enters objective lenses (4) as an electron beam (6) that permeates a sample, and an electron beam (7) that passes through a vacuum. The electron beam bends at the front magnetic fields of the objective lenses (4), and is emitted as a collimated beam in a state in which the sample location and vacuum are each appropriately spaced apart.
Inventors:
NAGAOKI ISAO (JP)
TANIGAKI TOSHIAKI (JP)
TANIGAKI TOSHIAKI (JP)
Application Number:
PCT/JP2011/062044
Publication Date:
December 01, 2011
Filing Date:
May 26, 2011
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
NAGAOKI ISAO (JP)
TANIGAKI TOSHIAKI (JP)
NAGAOKI ISAO (JP)
TANIGAKI TOSHIAKI (JP)
International Classes:
H01J37/295; H01J37/09; H01J37/24; H01J37/26
Foreign References:
| JP2006164861A | 2006-06-22 | |||
| JP2006216345A | 2006-08-17 | |||
| JP2008021626A | 2008-01-31 | |||
| JP2006313069A | 2006-11-16 | |||
| JPH076725A | 1995-01-10 | |||
| JP2006164861A | 2006-06-22 | |||
| JP2006216345A | 2006-08-17 | |||
| JP2006313069A | 2006-11-16 |
Other References:
See also references of EP 2579292A4
Attorney, Agent or Firm:
POLAIRE I. P. C. (JP)
Polaire Intellectual Property Corporation (JP)
Polaire Intellectual Property Corporation (JP)
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Claims: