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Title:
TRANSMISSION SYSTEM FOR TRANSMITTING PULSED LASER BEAM TO EXTREME UV LIGHT CHAMBER, AND LASER SYSTEM
Document Type and Number:
WIPO Patent Application WO/2016/038657
Kind Code:
A1
Abstract:
This transmission system for transmitting a pulsed laser beam into an extreme UV light chamber may contain: an optical path adjustment device whereby the optical path of a first pre-pulsed laser beam and the optical path of a second pre-pulsed laser beam are brought approximately together; an optical path separation device whereby the optical paths of the first pre-pulsed laser beam and the second pre-pulsed laser beam that have been brought approximately together by the optical path adjustment device are separated into the optical path of the first pre-pulsed laser beam and the optical path of the second pre-pulsed laser beam; a first beam adjustment device, disposed on the optical path of the first pre-pulsed laser beam separated by the optical path separation device, for adjusting the beam parameters of the first pre-pulsed laser beam; and a second beam adjustment device, disposed on the optical path of the second pre-pulsed laser beam separated by the optical path separation device, for adjusting the beam parameters of the second pre-pulsed laser beam.

Inventors:
ANDO MASAHIKO (JP)
UENO YOSHIFUMI (JP)
SUZUKI TORU (JP)
Application Number:
PCT/JP2014/073661
Publication Date:
March 17, 2016
Filing Date:
September 08, 2014
Export Citation:
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Assignee:
GIGAPHOTON INC (JP)
International Classes:
H05G2/00; H01L21/027
Foreign References:
JP2013004258A2013-01-07
JP2006303461A2006-11-02
JP2013175431A2013-09-05
US20130327963A12013-12-12
Attorney, Agent or Firm:
TOU-OU PATENT FIRM (JP)
Patent business corporation 藤央特許事務所 (JP)
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