Title:
TRANSPARENT CONDUCTIVE FILM AND TRANSPARENT CONDUCTIVE FILM LAMINATE, PROCESSES FOR PRODUCTION OF SAME, AND SILICON THIN FILM SOLAR CELL
Document Type and Number:
WIPO Patent Application WO/2010/104111
Kind Code:
A1
Abstract:
Provided are: a transparent conductive film which exhibits excellent resistance to the reduction caused by hydrogen and excellent light-trapping effect and which is useful in producing a high-efficiency silicon thin film solar cell; a transparent conductive film laminate using the same; processes for the production of the film and the laminate; and a silicon thin film solar cell in which the film or the laminate is used as the electrode. The transparent conductive film is characterized by comprising zinc oxide as the main component and containing at least one additional metal element selected from between aluminum and gallium in an amount satisfying relationship (1), and by exhibiting a surface roughness (Ra) of 35.0nm or more and a surface resistance of 65Ω/□ or lower.
-[Al] + 0.30 ≤ [Ga] ≤ -2.68 × [Al] + 1.74 (1)
[wherein [Al] is the aluminum content expressed in terms of Al/(Zn+Al) atomic ratio (%), while [Ga] is the gallium content expressed in terms of Ga/(Zn+Ga) atomic ratio (%)]
Inventors:
ABE Yoshiyuki (C/O Ichikawa Research Laboratories, SUMITOMO METAL MINING CO. LTD., 3-18-5, Nakakokubun, Ichikawa-sh, Chiba 88, 〒2728588, JP)
阿部 能之 (〒88 千葉県市川市中国分３－１８－５ 住友金属鉱山株式会社 市川研究所内 Chiba, 〒2728588, JP)
阿部 能之 (〒88 千葉県市川市中国分３－１８－５ 住友金属鉱山株式会社 市川研究所内 Chiba, 〒2728588, JP)
Application Number:
JP2010/054004
Publication Date:
September 16, 2010
Filing Date:
March 10, 2010
Export Citation:
Assignee:
SUMITOMO METAL MINING CO., LTD. (11-3, Shimbashi 5-chome Minato-k, Tokyo 16, 〒1058716, JP)
住友金属鉱山株式会社 (〒16 東京都港区新橋五丁目１１番３号 Tokyo, 〒1058716, JP)
ABE Yoshiyuki (C/O Ichikawa Research Laboratories, SUMITOMO METAL MINING CO. LTD., 3-18-5, Nakakokubun, Ichikawa-sh, Chiba 88, 〒2728588, JP)
住友金属鉱山株式会社 (〒16 東京都港区新橋五丁目１１番３号 Tokyo, 〒1058716, JP)
ABE Yoshiyuki (C/O Ichikawa Research Laboratories, SUMITOMO METAL MINING CO. LTD., 3-18-5, Nakakokubun, Ichikawa-sh, Chiba 88, 〒2728588, JP)
International Classes:
C23C14/08; C23C14/34; C23C14/58; H01B5/14; H01B13/00; H01L31/04
Attorney, Agent or Firm:
KAWABI Kenji (Higashi-ikebukuro Orimoto Bldg, 6th floor 9-7, Higashi-ikebukuro 3-chome, Toshima-k, Tokyo 13, 〒1700013, JP)