Title:
TRANSPARENT CONDUCTIVE FILM AND METHOD FOR PRODUCING TRANSPARENT CONDUCTIVE FILM
Document Type and Number:
WIPO Patent Application WO/2017/187763
Kind Code:
A1
Abstract:
Provided are an indium-free transparent conductive film in which the value of the work function can be adjusted over a wide range, and a method for manufacturing the transparent conductive film. A transparent conductive film, etc., that has zinc oxide as the main component and that is formed on a substrate, wherein: the transparent conductive film contains gallium as a first dopant and vanadium as a second dopant; when the total number of moles of zinc atoms, gallium atoms, and vanadium atoms is 100 atom%, the amount of gallium contained as the first dopant is a value in the range of 7-9 atom% and the amount of vanadium contained as the second dopant is a value in the range of 1-9 atom%; and the work function of the transparent conductive film is a value in the range of 4.5-5.5 eV.
Inventors:
HARA TSUTOMU (JP)
NAGAMOTO KOICHI (JP)
NAGAMOTO KOICHI (JP)
Application Number:
PCT/JP2017/007706
Publication Date:
November 02, 2017
Filing Date:
February 28, 2017
Export Citation:
Assignee:
LINTEC CORP (JP)
International Classes:
H05B33/28; C23C14/08; C23C14/24; C23C14/34; H01B5/14; H01B13/00; H01L51/50; H05B33/26
Domestic Patent References:
| WO2011010603A1 | 2011-01-27 |
Foreign References:
| JP2002075062A | 2002-03-15 | |||
| JP2013189331A | 2013-09-26 | |||
| JP2014172807A | 2014-09-22 |
Attorney, Agent or Firm:
EMORI Kenji et al. (JP)
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