Title:
TRANSPARENT CONDUCTIVE FILM AND METHOD FOR PRODUCTION THEREOF
Document Type and Number:
WIPO Patent Application WO/2007/119497
Kind Code:
A2
Abstract:
Disclosed is a transparent conductive film having excellent electrical conductivity and etching properties. Also disclosed is a method for producing the transparent conductive film. The transparent conductive film contains Zn, Sn and O, wherein the molar ratio of Zn to the sum total of Zn and Sn (Zn/(Zn+Sn)) is 0.41 to 0.55. The transparent conductive film is amorphous. The method comprises the step of spattering a sintered body (a target) in an inert gas atmosphere, wherein the sintered body contains Zn, Sn and O and the molar ratio of Zn to the sum total of Zn and Sn (Zn/(Zn+Sn)) in the sintered body is 0.53 to 0.65.
Inventors:
HATTORI, Takeshi (2-18-16, Aoyamadai Abiko-sh, Chiba 75, 2701175, JP)
服部武司 (〒75 千葉県我孫子市青山台２－１８－１６ Chiba, 2701175, JP)
HASEGAWA, Akira (3-7-21, Kasuga Tsukuba-sh, Ibaraki 21, 3050821, JP)
服部武司 (〒75 千葉県我孫子市青山台２－１８－１６ Chiba, 2701175, JP)
HASEGAWA, Akira (3-7-21, Kasuga Tsukuba-sh, Ibaraki 21, 3050821, JP)
Application Number:
JP2007/055935
Publication Date:
October 25, 2007
Filing Date:
March 15, 2007
Export Citation:
Assignee:
SUMITOMO CHEMICAL COMPANY, LIMITED (27-1, Shinkawa 2-chome Chuo-k, Tokyo 60, 1048260, JP)
住友化学株式会社 (〒60 東京都中央区新川二丁目２７番１号 Tokyo, 1048260, JP)
HATTORI, Takeshi (2-18-16, Aoyamadai Abiko-sh, Chiba 75, 2701175, JP)
服部武司 (〒75 千葉県我孫子市青山台２－１８－１６ Chiba, 2701175, JP)
住友化学株式会社 (〒60 東京都中央区新川二丁目２７番１号 Tokyo, 1048260, JP)
HATTORI, Takeshi (2-18-16, Aoyamadai Abiko-sh, Chiba 75, 2701175, JP)
服部武司 (〒75 千葉県我孫子市青山台２－１８－１６ Chiba, 2701175, JP)
International Classes:
H01B5/14; C01G19/00; C23C14/34; C23C14/58; H01B13/00; H01B5/14; C01G19/00; C23C14/34; C23C14/58; H01B13/00
Attorney, Agent or Firm:
ENOMOTO, Masayuki et al. (Limited5-33, Kitahama 4-chome,Chuo-ku, Osaka-sh, Osaka 50, 5418550, JP)
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