Title:
TRANSPARENT CONDUCTIVE FILM, SINTERED TARGET FOR PRODUCTION OF TRANSPARENT CONDUCTIVE FILM, TRANSPARENT CONDUCTIVE BASE MATERIAL AND DISPLAY DEVICE UTILIZING THE SAME
Document Type and Number:
WIPO Patent Application WO/2005/122186
Kind Code:
A1
Abstract:
A transparent conductive film that is amorphous, exhibiting high transmittance in the short wavelength region of visible light, and that is resistant to cracking by flexure. There is provided a transparent conductive film being an amorphous oxide film comprised of Ga, In and O containing Ga in a proportion of 35 to 45 atomic% based on all the metal atoms, which transparent conductive film has a resistivity of 1.2×10-3 to 8.0×10-3 &ohm ·cm, a thickness of ≤ 500 nm and a light transmittance at 380 nm wavelength of ≥ 45%.
Inventors:
NAKAYAMA TOKUYUKI (JP)
ABE YOSHIYUKI (JP)
ABE YOSHIYUKI (JP)
Application Number:
PCT/JP2005/010358
Publication Date:
December 22, 2005
Filing Date:
June 06, 2005
Export Citation:
Assignee:
SUMITOMO METAL MINING CO (JP)
NAKAYAMA TOKUYUKI (JP)
ABE YOSHIYUKI (JP)
NAKAYAMA TOKUYUKI (JP)
ABE YOSHIYUKI (JP)
International Classes:
C23C14/06; C23C14/08; C23C14/34; G09F9/30; H01B5/14; (IPC1-7): H01B5/14; C23C14/08; C23C14/34; G09F9/30
Foreign References:
| JPH09259640A | 1997-10-03 | |||
| JP2004050643A | 2004-02-19 | |||
| JP2003335552A | 2003-11-25 |
Attorney, Agent or Firm:
Shinohara, Taiji (Kudan-minami 3-chome Chiyoda-ku, Tokyo 74, JP)
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