TRANSPARENT CONDUCTIVE ZINC OXIDE FILM, PROCESS FOR PRODUCTION THEREOF, AND USE THEREOF

WIPO Patent Application WO/2011/126074

A1

A transparent conductive zinc oxide film which contains Ti, Al and Zn at an atomic ratio that fulfils the requirements represented by formulae (1), (2) and (3), has multiple surface textures having different sizes on the surface thereof, and has a surface having a center line average surface roughness (Ra) of 30 to 200 nm, wherein the average value of the widths of the surface textures is 100 nm to 10 μm. 0.001 ≤ Ti/(Zn+Al+Ti) ≤ 0.079 …(1) 0.001 ≤ Al/(Zn+Al+Ti) ≤ 0.079 …(2) 0.010 ≤ (Ti+Al)/(Zn+Al+Ti) ≤ 0.080 …(3)

JP2011212988	GLASS PLATE PROVIDED WITH TRANSPARENT CONDUCTIVE FILM AND METHOD FOR MANUFACTURING THE GLASS PLATE
JP2002114598	TRANSPARENT CONDUCTIVE MATERIAL AND METHOD FOR MANUFACTURING THE SAME
JP58223620	FORMATION OF FILM OF TIN OXIDE

AKIIKE Ryo (Tokyo Research Center 2743-1, Hayakawa, Ayase-sh, Kanagawa 23, 〒2521123, JP)
秋池　良 (〒23 神奈川県綾瀬市早川２７４３番地１　東ソー株式会社　東京研究センター内 Kanagawa, 〒2521123, JP)
KURAMOCHI Hideto (Tokyo Research Center 2743-1, Hayakawa, Ayase-sh, Kanagawa 23, 〒2521123, JP)

JP2011/058814

October 13, 2011

April 07, 2011

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TOSOH CORPORATION (4560, Kaisei-cho Shunan-sh, Yamaguchi 01, 〒7468501, JP)
東ソー株式会社 (〒01 山口県周南市開成町４５６０番地 Yamaguchi, 〒7468501, JP)
AKIIKE Ryo (Tokyo Research Center 2743-1, Hayakawa, Ayase-sh, Kanagawa 23, 〒2521123, JP)
秋池　良 (〒23 神奈川県綾瀬市早川２７４３番地１　東ソー株式会社　東京研究センター内 Kanagawa, 〒2521123, JP)

H01B5/14; C23C14/08; C23C14/58; H01B13/00

HASEGAWA Yoshiki et al. (SOEI PATENT AND LAW FIRM, Marunouchi MY PLAZA 9th fl. 1-1, Marunouchi 2-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)

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