Title:
TRANSPARENT ELECTROCONDUCTIVE FILM AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2012/086484
Kind Code:
A1
Abstract:
The objective of the present invention is to provide a transparent electroconductive film for which a transparent electroconductive layer comprising a low-resistance In/Sn compound oxide (ITO) is formed on a transparent base material, and to provide a method for manufacturing this film. This transparent electroconductive film has a transparent electroconductive layer comprising an In/Sn compound oxide formed on a transparent base material. The arithmetic mean roughness Ra of the surface of the transparent base material on which the transparent electroconductive layer is formed is 1.0 nm or less, and the amount of Sn atoms in the transparent electroconductive layer exceeds 6 weight% but is not more than 15 weight% with respect to the total weight of the In atoms and Sn atoms. The Hall mobility of the transparent electroconductive layer is 10-35 cm2/V·s and the carrier density is 6×1020-15×1020/cm3. This transparent electroconductive film is obtained by sputter-forming an amorphous transparent electroconductive layer in an atmosphere with a low water partial pressure and with a base material temperature that exceeds 100°C but is not more than 200°C, and then heating the amorphous transparent electroconductive layer to produce a crystalline transparent electroconductive layer.
More Like This:
Inventors:
KAJIHARA,Daisuke (1-1-2 Shimohozumi,Ibaraki-sh, Osaka 80, 〒5678680, JP)
梶原 大輔 (〒80 大阪府茨木市下穂積１丁目１番２号 日東電工株式会社内 Osaka, 〒5678680, JP)
梶原 大輔 (〒80 大阪府茨木市下穂積１丁目１番２号 日東電工株式会社内 Osaka, 〒5678680, JP)
Application Number:
JP2011/078875
Publication Date:
June 28, 2012
Filing Date:
December 14, 2011
Export Citation:
Assignee:
NITTO DENKO CORPORATION (1-1-2, ShimohozumiIbaraki-sh, Osaka 80, 〒5678680, JP)
日東電工株式会社 (〒80 大阪府茨木市下穂積１丁目１番２号 Osaka, 〒5678680, JP)
KAJIHARA,Daisuke (1-1-2 Shimohozumi,Ibaraki-sh, Osaka 80, 〒5678680, JP)
日東電工株式会社 (〒80 大阪府茨木市下穂積１丁目１番２号 Osaka, 〒5678680, JP)
KAJIHARA,Daisuke (1-1-2 Shimohozumi,Ibaraki-sh, Osaka 80, 〒5678680, JP)
International Classes:
C23C14/08; C23C14/58; G06F3/041; G06F3/045; H01B5/14; H01B13/00
Attorney, Agent or Firm:
UNIUS PATENT ATTORNEYS OFFICE (SHIN-OSAKA MT Bldg. 1, 13-9 Nishinakajima 5-chome, Yodogawa-ku, Osaka-sh, Osaka 11, 〒5320011, JP)
Download PDF:
Claims:
Previous Patent: PHOSPHOR COATING DEVICE, AND METHOD FOR MANUFACTURING LIGHT-EMITTING DEVICE
Next Patent: AUDIO CONTROL DEVICE AND IMAGE CAPTURE DEVICE
Next Patent: AUDIO CONTROL DEVICE AND IMAGE CAPTURE DEVICE