Title:
TRANSPARENT LAMINATED FILM HAVING BARRIER PROPERTY AND METHOD FOR PRODUCTION THEREOF
Document Type and Number:
WIPO Patent Application WO/2004/007191
Kind Code:
A1
Abstract:
A transparent laminated film having barrier property which comprises a transparent resin film substrate and a silicon nitride film formed thereon by the sputtering of a silicon simple substance target in a nitrogen containing atmosphere, and has a steam permeability of 0.05 g/m2/day or less and a transmissivity for a parallel light beam of 80 % or more. The laminated film combines good transparency and good barrier property for steam and can be suitably used for various packaging and sealing materials and as a substrate for an electronic device.
Inventors:
HIDAKA TOMOYUKI (JP)
TERASHIMA HISAAKI (JP)
AKATSU MASAMICHI (JP)
TERASHIMA HISAAKI (JP)
AKATSU MASAMICHI (JP)
Application Number:
PCT/JP2003/007853
Publication Date:
January 22, 2004
Filing Date:
June 20, 2003
Export Citation:
Assignee:
KUREHA CHEMICAL IND CO LTD (JP)
HIDAKA TOMOYUKI (JP)
TERASHIMA HISAAKI (JP)
AKATSU MASAMICHI (JP)
HIDAKA TOMOYUKI (JP)
TERASHIMA HISAAKI (JP)
AKATSU MASAMICHI (JP)
International Classes:
B32B9/00; B32B7/02; B32B27/06; B32B37/00; C23C14/06; C23C14/34; (IPC1-7): B32B9/00; C23C14/06
Foreign References:
| EP0798401A2 | 1997-10-01 | |||
| US5853833A | 1998-12-29 | |||
| JPH06196023A | 1994-07-15 | |||
| JPH1058585A | 1998-03-03 | |||
| JP2002293971A | 2002-10-09 | |||
| JP2002321311A | 2002-11-05 |
Attorney, Agent or Firm:
Endo, Yukio (2nd Floor Miyata Building, 17-16,
Nishi-Shimbashi 1-Chom, Minato-Ku Tokyo, JP)
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