Title:
TRANSPORT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2022/130758
Kind Code:
A1
Abstract:
A transport system 1 is equipped with a first track 10 provided in a first building 100, a second track 20 provided in a second building 200, overhead transport vehicles 40A, 40B, and a relay unit 30 for passing FOUPs 300 between the overhead transport vehicle 40A and the overhead transport vehicle 40B. The overhead transport vehicle 40A traveling on a first outward route 32a and the overhead transport vehicle 40B traveling on a second return route 33b can transfer the FOUPs 300 to the same storage shelf 31, and the overhead transport vehicle 40A traveling on a first return route 32b and the overhead transport vehicle 40B traveling on a second outward route 33a can transfer the FOUPs 300 to the same storage shelf 31.
Inventors:
MOTOORI YOICHI (JP)
Application Number:
PCT/JP2021/037889
Publication Date:
June 23, 2022
Filing Date:
October 13, 2021
Export Citation:
Assignee:
MURATA MACHINERY LTD (JP)
International Classes:
B65G1/04; H01L21/677
Domestic Patent References:
| WO2019087571A1 | 2019-05-09 | |||
| WO2017029871A1 | 2017-02-23 | |||
| WO2019211933A1 | 2019-11-07 |
Foreign References:
| JP2012066933A | 2012-04-05 | |||
| US20170194181A1 | 2017-07-06 | |||
| JP2012066933A | 2012-04-05 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Download PDF: