Title:
TRANSPORT UNIT AND PROBER
Document Type and Number:
WIPO Patent Application WO/2017/145396
Kind Code:
A1
Abstract:
The invention provides a prober and a transport unit such that throughput at each measurement unit can be increased in a prober equipped with a transport unit moving between a transport object housing unit and a plurality of measurement units, and transporting transport objects (for instance, a wafer and/or a probe card) to the transport object housing unit or each of the measurement units. The prober 10 comprises: the transport object housing unit 12 housing a plurality of transport objects; the plurality of measurement units 14; the transport unit 16 moving between the plurality of measurement units 14 and the transport object housing unit 12 housing the plurality of transport objects, and transporting transport objects into the transport object housing unit 12 or into each of the measurement units 14; and a moving device 22. The transport unit 16 comprises environment control means 16d for controlling the internal environment of the casing 16a, and air-curtain forming means 42 causing the interior of the casing 16a to become a sealed or a substantially sealed space.
Inventors:
SAKAI KENTARO (JP)
ICHIKAWA TAKEKIYO (JP)
ICHIKAWA TAKEKIYO (JP)
Application Number:
PCT/JP2016/060791
Publication Date:
August 31, 2017
Filing Date:
March 31, 2016
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD (JP)
International Classes:
H01L21/66; H01L21/677
Foreign References:
| JP2002026107A | 2002-01-25 | |||
| JP2002313867A | 2002-10-25 | |||
| JPH0285056A | 1990-03-26 | |||
| JP2002353287A | 2002-12-06 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
Download PDF:
Previous Patent: DISPOSABLE DIAPER
Next Patent: COMMUNICATION DEVICE, COMMUNICATION METHOD, AND COMMUNICATION SYSTEM
Next Patent: COMMUNICATION DEVICE, COMMUNICATION METHOD, AND COMMUNICATION SYSTEM