Title:
TRAVERSE DEVICE AND SUBSTRATE PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/148633
Kind Code:
A1
Abstract:
Provided is a traverse device with which it is possible to reduce the number of components by means of a simplified structure and with which it is also possible to reduce the time taken to move a substrate, and also provided is a vacuum processing device which has the traverse device mounted therein. A holding base (32) for holding a transfer tray (17) is rotated by means of a parallel link mechanism (40) to thereby move the transfer tray (17) between an outward path (R1) and a return path (R2). It is therefore possible to move the transfer tray (17) by means of one drive unit (50) for driving the parallel link mechanism (40), without the need for a conventional biaxial movement operation involving a lift mechanism and a slide mechanism. In other words, it is possible to simplify the structure of the traverse device (30) and reduce the number of components. It is consequently possible to reduce costs and reduce maintenance frequency. Furthermore, by using the rotation of the holding base (32) to induce movement, it is possible to reduce movement time compared with a conventional traverse device.
Inventors:
YOSHIDA, Daisuke (INC. 2500 Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
Application Number:
JP2011/002918
Publication Date:
December 01, 2011
Filing Date:
May 25, 2011
Export Citation:
Assignee:
ULVAC, INC. (2500 Hagisono, Chigasaki-shi Kanagawa, 43, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００番地 Kanagawa, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００番地 Kanagawa, 〒2538543, JP)
International Classes:
H01L21/677; B65G49/06
Attorney, Agent or Firm:
OMORI, Junichi (2nd Floor U&M Akasaka Bldg, 7-5-47 Akasaka, Minato-k, Tokyo 52, 〒1070052, JP)
Claims:
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