Title:
TRAY CARRIER WITH ULTRAPHOBIC SURFACES
Document Type and Number:
WIPO Patent Application WO2004093151
Kind Code:
B1
Abstract:
A tray carrier with ultraphobic surfaces for promoting more effective cleaning and drying of the carrier. Entire surfaces or portions of surfaces of a carrier (12) are made ultraphobic. The ultraphobic surfaces of the carrier cause liquids that may come in contact with the surface, such as may be used in cleaning, to quickly and easily roll off without leaving a liquid film or substantial number of liquid droplets. As a result, less time and energy is expended in drying the surfaces, and redeposited residue is minimized, thereby improving overall process quality. In addition, the ultraphobic surfaces may be resistant to initial deposition of contaminants, where the contaminants may be in liquid or vapor form.
Inventors:
EXTRAND CHARLES W (US)
Application Number:
PCT/US2004/011540
Publication Date:
April 14, 2005
Filing Date:
April 14, 2004
Export Citation:
Assignee:
ENTEGRIS INC (US)
EXTRAND CHARLES W (US)
EXTRAND CHARLES W (US)
International Classes:
B01L3/00; B01L9/00; B08B17/06; F15D1/06; B01L99/00; H01L21/673; (IPC1-7): B65D85/86; B65D85/00; B65D85/48
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