Title:
TRAY USED FOR THIN-FILM DEPOSITION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/121024
Kind Code:
A1
Abstract:
Provided is a tray used for a thin-film deposition device, comprising: a first tray body (11), a plurality of through-holes (111) used for carrying wafers being provided on the first tray body (11); and a second tray body (12), stacked under the first tray body (11), the size of the second tray body (12) corresponding to the size of the first tray body (11); the first tray body (11) is made of a first material, the second tray body (12) is made of a second material, and the relative deviation between the thermal expansion coefficient of the first material and the thermal expansion coefficient of a thin film to be deposited is within a preset range so as to reduce the impact of stress on the wafer when depositing the thin-film; the volume resistivity of the first material is greater than the volume resistivity of the second material, such that the first tray body remains an insulator when the thin film is being deposited on the wafer. Not only is the stress during the formation of aluminum nitride thin film effectively reduced, but the impact of changes in electric and magnetic fields on the formation of the aluminum nitride thin film due to the transformation of the tray into a non-insulator is also decreased.
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Inventors:
MA YINGGONG (CN)
DONG BOYU (CN)
GUO BINGLIANG (CN)
WU XUEWEI (CN)
WU SHUBO (CN)
ZHAO CHENGUANG (CN)
ZHAI HONGTAO (CN)
YANG YILONG (CN)
YANG JIAN (CN)
ZHEN ZIYANG (CN)
SONG LINGYAN (CN)
SUN LUYANG (CN)
LI XINYING (CN)
LIU YUJIE (CN)
XU WENXUE (CN)
ZHANG LU (CN)
CUI YAXIN (CN)
DONG BOYU (CN)
GUO BINGLIANG (CN)
WU XUEWEI (CN)
WU SHUBO (CN)
ZHAO CHENGUANG (CN)
ZHAI HONGTAO (CN)
YANG YILONG (CN)
YANG JIAN (CN)
ZHEN ZIYANG (CN)
SONG LINGYAN (CN)
SUN LUYANG (CN)
LI XINYING (CN)
LIU YUJIE (CN)
XU WENXUE (CN)
ZHANG LU (CN)
CUI YAXIN (CN)
Application Number:
PCT/CN2020/133058
Publication Date:
June 24, 2021
Filing Date:
December 01, 2020
Export Citation:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
H01L21/687; C23C14/06; C23C14/35; C23C14/50
Foreign References:
| CN111128845A | 2020-05-08 | |||
| CN204644466U | 2015-09-16 | |||
| CN107591354A | 2018-01-16 | |||
| CN106256929A | 2016-12-28 | |||
| CN106663647A | 2017-05-10 | |||
| US6454865B1 | 2002-09-24 | |||
| US5169684A | 1992-12-08 |
Attorney, Agent or Firm:
TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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