Title:
TREATING DEVICE FOR ELEMENT TO BE TREATED AND TREATING METHOD
Document Type and Number:
WIPO Patent Application WO/2003/083933
Kind Code:
A1
Abstract:
An element to be treated (W) is attracted by an electrostatic chuck (36) onto a mounting table (34) in a treating container (4). When the element to be treated (W) is released by lifting it up by a lifter pin (58) after a destaticizing voltage is applied to the electrostatic chuck (36), whether or not the element (W) jumps up on the mounting table (34) is detected by a jump-up detector. The jump-up detector comprises a discharge detection section (76) for detecting at least one of the discharge current or the discharge voltage generated between the element (W) and the mounting table (34) when the element (W) is to be released, and a judging section (78) for judging the occurrence of the jump-up of the element (W) based on the detection result by the detection section.
Inventors:
ONO KATSUHIKO (JP)
Application Number:
PCT/JP2003/003648
Publication Date:
October 09, 2003
Filing Date:
March 25, 2003
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
ONO KATSUHIKO (JP)
ONO KATSUHIKO (JP)
International Classes:
H01L21/00; H01L21/683; H01L21/3065; (IPC1-7): H01L21/68; H01L21/3065; H01L21/205
Foreign References:
| JPH1140661A | 1999-02-12 | |||
| JPH07240458A | 1995-09-12 | |||
| US6125025A | 2000-09-26 | |||
| JPH03141545A | 1991-06-17 |
Attorney, Agent or Firm:
Yoshitake, Kenji (Room 323 Fuji Bldg., 2-3, Marunouchi 3-chom, Chiyoda-ku Tokyo, JP)
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