Title:
TREATMENT APPARATUS USING REACTIVE OXYGEN AND TREATMENT METHOD USING REACTIVE OXYGEN
Document Type and Number:
WIPO Patent Application WO/2023/127839
Kind Code:
A1
Abstract:
This treatment apparatus and treatment method using reactive oxygen are capable of more efficiently treating the surface of a treatment target object by using reactive oxygen. This treatment apparatus using reactive oxygen comprises: a reactive oxygen supply device having a plasma actuator and an ozonolysis device in a housing having at least one opening; and a means for transporting a treatment target object. In the plasma actuator, a first electrode and a second electrode are provided with a dielectric body being interposed therebetween, and an induced flow containing ozone is generated by applying a voltage between the two electrodes. The plasma actuator and the ozonolysis device are disposed such that the induced flow containing reactive oxygen flows out through the opening, and is supplied to the surface of the treatment target object that is transported by the transport means. Flowout direction vectors of the induced flow containing reactive oxygen include vector components that are parallel to a direction A and that are directed toward the same direction. The present invention is also a treatment method using reactive oxygen.
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Inventors:
HONGO MASATSUGU (JP)
UEMATSU ATSUSHI (JP)
KIKUCHI YUICHI (JP)
FURUKAWA TAKUMI (JP)
YAMAUCHI KAZUHIRO (JP)
ASANUMA NAOYA (JP)
HIRATA JUNKO (JP)
OGUMA TORU (JP)
UEMATSU ATSUSHI (JP)
KIKUCHI YUICHI (JP)
FURUKAWA TAKUMI (JP)
YAMAUCHI KAZUHIRO (JP)
ASANUMA NAOYA (JP)
HIRATA JUNKO (JP)
OGUMA TORU (JP)
Application Number:
PCT/JP2022/048047
Publication Date:
July 06, 2023
Filing Date:
December 26, 2022
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
B01J19/00; A61L2/20; C01B13/02; H05H1/24
Domestic Patent References:
| WO2022092325A1 | 2022-05-05 |
Foreign References:
| JP2014073482A | 2014-04-24 | |||
| JP2009238519A | 2009-10-15 | |||
| JPS6425866A | 1989-01-27 | |||
| JPS523872A | 1977-01-12 |
Attorney, Agent or Firm:
IP FIRM SHUWA (JP)
Download PDF:
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