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Title:
TREATMENT DEVICE AND TREATMENT METHOD, PROCESSING METHOD, AND SHAPING DEVICE AND SHAPING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/116452
Kind Code:
A1
Abstract:
This treatment device, which performs a treatment of irradiating an object with an energy beam, is provided with: an energy beam irradiation device which irradiates at least a portion of the surface of an object with an energy beam; and a position change device which changes the energy beam irradiation position on the surface of the object, wherein the energy beam irradiation position is controlled by using shape information about the shape of the object.

Inventors:
UENO, Kazuki (15-3 Konan 2-chome, Minato-k, Tokyo 90, 〒1086290, JP)
SEKIGUCHI, Kei (15-3 Konan 2-chome, Minato-k, Tokyo 90, 〒1086290, JP)
SHIRAISHI, Masayuki (15-3 Konan 2-chome, Minato-k, Tokyo 90, 〒1086290, JP)
EGAMI, Shigeki (15-3 Konan 2-chome, Minato-k, Tokyo 90, 〒1086290, JP)
Application Number:
JP2017/044615
Publication Date:
June 20, 2019
Filing Date:
December 12, 2017
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Assignee:
NIKON CORPORATION (15-3, Konan 2-chome Minato-k, Tokyo 90, 〒1086290, JP)
International Classes:
B23K26/342; B22F3/105; B22F3/16; B29C64/268
Domestic Patent References:
WO2016075801A12016-05-19
Foreign References:
JP2015196249A2015-11-09
JP2017019018A2017-01-26
JP2000073108A2000-03-07
JP2015231688A2015-12-24
Attorney, Agent or Firm:
EGAMI, Tatsuo (3rd Floor Oak Building Kyobashi, 16-10, Kyobashi 1-chome, Chuou-k, Tokyo 31, 〒1040031, JP)
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