Title:
TREATMENT SOLUTION
Document Type and Number:
WIPO Patent Application WO/2017/126554
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing a treatment solution that imparts corrosion-preventing properties to a metal film disposed on a substrate, and exhibits excellent removability of an organic film on a substrate or removability of a dry etching residue or dry ashing residue adhered to a substrate. This treatment solution includes water, a hydrophilic organic solvent, a quaternary ammonium salt, and an inorganic anion, wherein the content of the inorganic anion is 0.001 mass ppt to 1 mass ppm with respect to the total mass of the treatment solution.
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Inventors:
MURAYAMA SATORU (JP)
Application Number:
PCT/JP2017/001560
Publication Date:
July 27, 2017
Filing Date:
January 18, 2017
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
C11D7/32; C11D7/08; C11D7/10; C11D7/50; C11D7/54; C11D17/08; H01L21/304
Foreign References:
| JP2012009513A | 2012-01-12 |
Attorney, Agent or Firm:
WATANABE Mochitoshi et al. (JP)
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