TRICHLOROSILANE COOLING TOWER AND PROCESS FOR PRODUCING TRICHLOROSILANE WITH THE SAME

Title:

TRICHLOROSILANE COOLING TOWER AND PROCESS FOR PRODUCING TRICHLOROSILANE WITH THE SAME

Document Type and Number:

WIPO Patent Application WO/2010/100750

Kind Code:

A1

Abstract:

A trichlorosilane cooling tower with which the efficiency of cooling a reaction product gas can be greatly improved. The cooling tower comprises: a primary cooling means in which a cooling liquid is sprayed in the form of droplets having an average diameter of 2,000 µm or smaller over a reaction product gas containing trichlorosilane and obtained by reacting a raw-material gas comprising tetrachlorosilane and hydrogen at a temperature in the range of 700-1,400°C to thereby rapidly cool the reaction product gas to a temperature in the range of 70-600°C; and a secondary cooling means which is disposed above the primary cooling means and in which the cooling liquid is further sprayed over the reaction product gas which has undergone the primary cooling to thereby cool the gas to a temperature in the range of 30-60°C.

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Inventors:

MATSUO YASUFUMI (JP)
TAKEMURA KOUICHI (JP)
NAKAMOTO JUN (JP)

Application Number:

PCT/JP2009/054271

Publication Date:

September 10, 2010

Filing Date:

March 06, 2009

Export Citation:

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Assignee:

DENKI KAGAKU KOGYO KK (JP)
MATSUO YASUFUMI (JP)
TAKEMURA KOUICHI (JP)
NAKAMOTO JUN (JP)

International Classes:

C01B33/107

Foreign References:

JPS4895396A	1973-12-07
JP2009007240A	2009-01-15
JP2008143775A	2008-06-26
JP2008137885A	2008-06-19
JPS6163519A	1986-04-01
JPS6081010A	1985-05-09