Title:
TRICHLOROSILANE MANUFACTURING APPARATUS, AND METHOD FOR MANUFACTURING TRICHLOROSILANE
Document Type and Number:
WIPO Patent Application WO/2019/098345
Kind Code:
A1
Abstract:
The purpose of the present invention is to prevent corrosion and stress corrosion cracking due to hydrochloric acid generated in a filter element (80) portion. A trichlorosilane manufacturing apparatus (1) provided with a reaction device (2) for generating trichlorosilane and a filter device (3) for removing a reaction residue, the filter device (3) being provided with a filter element constituted from a corrosion-resistant material.
Inventors:
HIROTA KENJI (JP)
OGIHARA KATSUYA (JP)
OGIHARA KATSUYA (JP)
Application Number:
PCT/JP2018/042557
Publication Date:
May 23, 2019
Filing Date:
November 16, 2018
Export Citation:
Assignee:
TOKUYAMA CORP (JP)
International Classes:
C01B33/107; B01D39/20
Foreign References:
| CN102815706A | 2012-12-12 | |||
| JP2011168443A | 2011-09-01 | |||
| JP2013112589A | 2013-06-10 | |||
| JPS4847500A | 1973-07-05 | |||
| JP2009292675A | 2009-12-17 | |||
| CN201643908U | 2010-11-24 | |||
| JP2011184242A | 2011-09-22 |
Other References:
See also references of EP 3715329A4
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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