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Title:
TRIHALOSILANE REFINING DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/070044
Kind Code:
A1
Abstract:
The present application relates to a trihalosilane refining device and method. The present application enables high-purity trihalosilane to be acquired from a feed comprising trihalosilane, whilst little energy is consumed.

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Inventors:
LEE SUNG KYU (KR)
SHIN JOON HO (KR)
LEE JONG KU (KR)
KIM SUNG KYUN (KR)
Application Number:
PCT/KR2012/009514
Publication Date:
May 16, 2013
Filing Date:
November 12, 2012
Export Citation:
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Assignee:
LG CHEMICAL LTD (KR)
International Classes:
C01B33/107; B01D3/14; B01D53/00; B01J10/00
Foreign References:
KR20100070485A2010-06-28
KR20100105500A2010-09-29
KR20100042933A2010-04-27
JP2002234721A2002-08-23
Other References:
See also references of EP 2778132A4
Attorney, Agent or Firm:
DANA PATENT LAW FIRM (KR)
특허법인 다나 (KR)
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