TUBULAR PECVD AUTOMATIC LOADING AND UNLOADING DEVICE

WIPO Patent Application WO/2019/148522

A1

A tubular PECVD automatic loading and unloading device, comprising a cantilever structure (10), a grasping structure (20), a lifting structure (30), and two vertical profiles (40) which are parallel to each other. The cantilever structure (10) is separately provided on the two vertical profiles (40). The lifting structure (30) is used for driving the cantilever structures (10) to reciprocate on the vertical profiles (40). The cantilever structure (10) comprises a first cantilever (101) and a second cantilever (102). The middle part of the first cantilever (101) is mounted on the vertical profile (40). A first connecting plate (103) is slidably mounted on a lower surface of the first cantilever (101). The first connecting plate (103) reciprocates on the first cantilever (101). The second cantilever (102) is fixedly connected to the first connecting plate (103). A second connecting plate (104) is slidably mounted on a lower surface of the second cantilever (102). The second connecting plate (104) reciprocates on the second cantilever (102). The grasping structure (20) is fixedly mounted on the second connecting plate (104).

WANG JUNCHAO (CN)
CHANG HONGWANG (CN)
LI XUEWEN (CN)
LI JUNYANG (CN)

PCT/CN2018/075727

August 08, 2019

February 08, 2018

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SHENZHEN FULLSHARE EQUIPMENT CO LTD (CN)

H01L21/677; B65G47/91; B65G49/07

CN102709212A	2012-10-03
CN106282971A	2017-01-04
CN203998096U	2014-12-10
US20170170356A1	2017-06-15
CN201778110U	2011-03-30
KR20130054592A	2013-05-27
KR20130087096A	2013-08-06

SHENZHEN SHENKEXIN INTELLECTUAL PROPERTY LLP. (CN)

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