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Title:
TUBULAR PECVD FURNACE DOOR ADJUSTMENT MECHANISM
Document Type and Number:
WIPO Patent Application WO/2019/148521
Kind Code:
A1
Abstract:
A tubular plasma-enhanced chemical vapor deposition (PECVD) furnace door adjustment mechanism, comprising a furnace door (10), push rods (20), corrugated pipes (30), and an adjustment assembly (40); the adjustment assembly (40) comprises a support plate (401) and an adjustment screw (402); both the support plate (401) and the furnace door (10) are provided thereon with through holes for the push rods (20) to pass through; the corrugated pipes (30) are sleeved on the push rods (20), and an end of the corrugated pipes (30) is fixedly mounted on the support plate (401), while the other end of the corrugated pipes (30) is pressed onto the furnace door (10); the furnace door (10) is used to cover a furnace opening of a reaction chamber under the action of the thrust of the push rods (20); an end of the adjustment screw (402) is movably mounted on the furnace door (10), and the other end of the adjustment screw (402) is screwed connected to the support plate (401), the flatness of the furnace door (10) on the furnace opening being adjusted by means of the adjustment screw (402).

Inventors:
WANG, Junchao (2nd Fl, Bldg. A Han's Innovation Mansion,#9018 Beihuan Road, Hi-Tech Industrial Park, Nanshan Distric, Shenzhen Guangdong 0, 518000, CN)
WANG, Feilong (2nd Fl, Bldg. A Han's Innovation Mansion,#9018 Beihuan Road, Hi-Tech Industrial Park, Nanshan Distric, Shenzhen Guangdong 0, 518000, CN)
LI, Xuewen (2nd Fl, Bldg. A Han's Innovation Mansion,#9018 Beihuan Road, Hi-Tech Industrial Park, Nanshan Distric, Shenzhen Guangdong 0, 518000, CN)
LI, Junyang (2nd Fl, Bldg. A Han's Innovation Mansion,#9018 Beihuan Road, Hi-Tech Industrial Park, Nanshan Distric, Shenzhen Guangdong 0, 518000, CN)
Application Number:
CN2018/075725
Publication Date:
August 08, 2019
Filing Date:
February 08, 2018
Export Citation:
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Assignee:
SHENZHEN FULLSHARE EQUIPMENT CO., LTD. (2nd Fl, Bldg. A Han's Innovation Mansion,#9018 Beihuan Road, Hi-Tech Industrial Park, Nanshan Distric, Shenzhen Guangdong 0, 518000, CN)
International Classes:
C23C16/513; F27D1/18
Attorney, Agent or Firm:
SHENZHEN SHENKEXIN INTELLECTUAL PROPERTY LLP.: (Room 2420, BlockA South International Plaza,Yitian Road, Fubao Street, Futian Distric, Shenzhen Guangdong 0, 518000, CN)
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