Title:
TUNABLE BULK ACOUSTIC WAVE MEMS MICRORESONATOR
Document Type and Number:
WIPO Patent Application WO2003069776
Kind Code:
A3
Abstract:
The invention relates to a suspended bulk acoustic wave microresonator comprising a beam which is made from a piezoelectric material (1). Said beam is solidly connected to a support (3) and is sandwiched between excitation electrodes (4, 5). The inventive resonator also comprises means of modifying the limiting conditions of the resonator, which is formed by the excited beam, in order to alter the resonance frequency of the microresonator.
Inventors:
ROBERT PHILIPPE (FR)
Application Number:
PCT/FR2003/000427
Publication Date:
April 08, 2004
Filing Date:
February 11, 2003
Export Citation:
Assignee:
COMMISSARIAT ENERGIE ATOMIQUE (FR)
ROBERT PHILIPPE (FR)
ROBERT PHILIPPE (FR)
International Classes:
B81B3/00; H03H9/17; H03H9/24; (IPC1-7): H03H9/17
Foreign References:
| US5446306A | 1995-08-29 | |||
| US20010022546A1 | 2001-09-20 |
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