Title:
TUNING FORK-SHAPED VIBRATOR AND VIBRATION GYRO USING THE SAME
Document Type and Number:
WIPO Patent Application WO/2008/010337
Kind Code:
A1
Abstract:
A tuning fork-shaped vibrator small-sized, having a reduced height, and capable of
being used as a vibration gyro having excellent detection sensitivity, and a
vibration gyro using the tuning fork-shaped vibrator. The tuning fork-shaped vibrator
(10) formed on a substrate (12) includes a vibration body (14). The vibration
body (14) has a meander shape as a whole and a vibration piece at the center of the
vibration body is used as a first detection section (62). On one side of the vibration
body (14), there are formed drive electrodes (16, 18) connected to lead-out electrodes
(26, 28). On one main surface of the first detection section (62) are formed a
detection electrode (20) and a common electrode (22). On the other main surface
of the vibration body (14) is a common electrode (22) which is connected to the
common electrode (22) on the one main surface via a through-hole (24). The detection
electrode (20) and the common electrode (22) are connected to the lead-out electrodes
(30, 32).
Inventors:
FUJIMOTO KATSUMI (JP)
KOIKE MASATO (JP)
KOIKE MASATO (JP)
Application Number:
PCT/JP2007/057825
Publication Date:
January 24, 2008
Filing Date:
April 09, 2007
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
FUJIMOTO KATSUMI (JP)
KOIKE MASATO (JP)
FUJIMOTO KATSUMI (JP)
KOIKE MASATO (JP)
International Classes:
G01C19/56; G01C19/5621; G01C19/5628; G01P9/04; H01L41/08; H01L41/18
Foreign References:
| JP2001050751A | 2001-02-23 | |||
| JP2004061486A | 2004-02-26 | |||
| JP2001082963A | 2001-03-30 | |||
| JP2004242256A | 2004-08-26 |
Attorney, Agent or Firm:
OKADA, Masahiro (3rd Floor Iyo Building,2-21, Minamihonmachi 4-chome,Chuo-ku, Osaka-shi, Osaka 54, JP)
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