TUNING FORK TYPE BIMORPH PIEZOELECTRIC VIBRATOR, VIBRATING GYRO-MODULE USING THE VIBRATOR, AND METHOD FOR MANUFACTURING THE TUNING FORK TYPE BIMORPH PIEZOELECTRIC VIBRATOR

WIPO Patent Application WO/2007/125615

A1

Provided is a tuning fork type bimorph piezoelectric vibrator, which can improve the temperature characteristics of a detuned frequency and can detect a rotating angular velocity stably and precisely at a low cost. The tuning fork type bimorph piezoelectric vibrator (100) has an intermediate metal film (112) formed on a junction face by junctioning two piezoelectric portions (110a, 110b) confronting each other in a polarizing direction. A first slit (120) is formed to form tuning fork type leg portions (122a, 122b) and a base portion (124). Second slits (130a, 130b) are formed on one principal face (or the surface of one piezoelectric portion (110a)) having a surface metal film, thereby to form driving and detecting electrodes (140, 142a, 142b). The tuning fork type bimorph piezoelectric vibrator has no back metal film at such a portion of its other principal face (or the surface of the other piezoelectric portion (110b)) as is exposed to a predetermined or higher stress at least at its action time, thereby to improve the temperature characteristics of the detuned frequency.

KURAKAWA HARUYOSHI (JP)

PCT/JP2006/317324

November 08, 2007

September 01, 2006

Click for automatic bibliography generation  

MURATA MANUFACTURING CO (JP)
KURAKAWA HARUYOSHI (JP)

B06B1/06; H01L41/09; G01C9/04; G01C19/56; G01C19/5628; H01L41/08; H01L41/22; H01L41/313; H01L41/335; H01L41/338; H03H3/02

JPH08122082A	1996-05-17
JP2005172542A	2005-06-30

OKADA, Masahiro (3rd Floor Iyo Building,2-21, Minamihonmachi 4-chome,Chuo-ku, Osaka-shi, Osaka, JP)

View/Download PDF      PDF Help

Previous Patent: MAILBOX AND DEVICE FOR PREVENTING UNAUTHORIZED REMOVAL OF DELIVERY

Next Patent: OPTICAL SHEET SET, BACKLIGHT UNIT, AND DISPLAY DEVICE