RELATED APPLICATIONS

[0001] This application claims the benefit of and priority to U.S. Application No. 14/210,168 filed 13 March 2014, which claims the benefit of and priority to U.S. Provisional Application No. 61/783,809 filed 14 March 2013, and which are both incorporated herein in their entirety.

FIELD

[0002] The present invention relates to turbo-molecular pumps used for semiconductor manufacturing.

BACKGROUND

[0003] Turbo-molecular pumps are used to draw gasses and suspended particles from chambers that are used to process semiconductor wafers. A conventional pump is illustrated in Figure 1, and includes a turbine 10 mounted to a pump rotor 12 via mounting bolts 14. The turbine 10 includes fins 16 used to pump the gasses and suspended particles from the chamber (not shown). The tops of the bolts 14 are recessed from the top surface of the turbine 10 in a bolt cavity 18 that has an open end. This conventional design has worked dependably in the past for many years.

[0004] Recently, however, conventional pumps having this design have been found to require increased maintenance due to excessive residual process particulate in the wafer chamber, which can result in lower yields. It was discovered that the residual process particulate originates from particles that settle into the bolt cavity 18, and after a certain amount of time and accumulation, are emitted back into the chamber where they can contaminate the wafers being processed therein. This contamination has recently become more problematic because residual process particulate from the bolt cavity 18 are no longer tolerable in many present day wafer processing applications given the reduced process geometries.

[0005] There is a need for an improved turbine that prevents excessive residual process particulate. SUMMARY OF THE INVENTION

[0006] Systems and methods here include example embodiments with a turbine cap assembly comprising a cap member having a first hole and a first portion with a first

circumference, a plate member having a second circumference and a second hole, an o-ring disposed between the cap member and plate member, and having a third circumference, and a threaded bolt extending through the first hole and second hole, wherein a distance between the cap member and the plate member is adjustable by rotation of the threaded bolt between a first position in which the o-ring is compressed by the cap member and the plate member and a second position in which the o-ring is not compressed by the cap member and the plate member. Certain embodiments include where in the first position, the third circumference is greater than the first and second circumferences, and in the second position, at least one of the first and second circumferences is greater than the third circumference.

[0007] Some embodiments include where the cap member includes a first chamfered outer edge, the plate member includes a second chamfered outer edge, and in the first position, the o- ring is compressed by and between the first and second chamfered outer edges. Certain embodiments include where the o-ring is comprised of rubber. Some embodiments include the assembly with the cap member includes a second portion with a larger circumference than the first circumference, and wherein the second portion has an upper surface in a shape of at least one of parabolic, square, rounded, conical and asymmetrical. Certain embodiments have the cap member including at least one vent. Some example embodiments have where the cap member includes one or more fins extending from an upper surface thereof. Certain embodiments include wherein the cap member includes a channel formed into an upper surface thereof.

[0008] Certain example embodiments here include where the turbine cap assembly includes cutouts in at least one of the cap and plate. Some embodiments include wherein the first hole extends completely through the cap member. Certain embodiments have wherein the first hole in the cap member is threaded and some include wherein the second hole in the plate member is threaded.

[0009] Some embodiments include systems and methods with a capped turbine assembly comprising a turbine that includes a bolt cavity formed into a top surface of the turbine and having inside walls and an open end, a plurality of fins extending from the turbine, and a plurality of bolts extending through the turbine for mounting the turbine to a pump rotor, wherein tops of the plurality of bolts are recessed from the top surface in the bolt cavity, and a cap assembly that includes, a cap member having a first hole and a first portion with a first circumference, a plate member having a second circumference and a second hole, an o-ring disposed between the cap member and plate member, and having a third circumference, and a threaded bolt extending through the first hole and the second hole, wherein a distance between the cap member and the plate member is adjustable by rotation of the threaded bolt between a first position in which the o-ring is compressed by the cap member and the plate member to engage with the inside walls to secure the cap assembly to the turbine, and a second position in which the o-ring is not compressed by the cap member and the plate member to release the cap assembly from the turbine.

[0010] Certain embodiments include wherein in the first position, the third circumference is greater than the first and second circumferences, and in the second position, at least one of the first and second circumferences is greater than the third circumference. Some embodiments include the assembly with the cap member includes a first chamfered outer edge, the plate member includes a second chamfered outer edge, and in the first position, the o-ring is compressed by and between the first and second chamfered outer edges. Some example embodiments have the o-ring comprised of rubber. In some embodiments here the cap member includes a second portion with a larger circumference than the first circumference, and wherein the second portion has an upper surface in a shape of at least one of parabolic, square, rounded, conical and asymmetrical. In certain embodiments, the cap member includes at least one vent.

[0011] Certain embodiments have the cap member include one or more fins extending from an upper surface thereof. Some example embodiments have the cap member include a channel formed into an upper surface thereof. Some embodiments have cutouts included in at least one of the cap member and plate member. Some have the first hole extend completely through the cap member. Some embodiments have the first hole in the cap member threaded. Some example embodiments have the second hole in the plate member threaded.

[0012] Some example embodiments include systems and methods of capping a turbine assembly with a cap assembly, wherein the turbine assembly includes, a bolt cavity formed into a top surface of the turbine and having inside walls and an open end, a plurality of fins extending from the turbine, and a plurality of bolts extending through the turbine for mounting the turbine to a pump rotor, wherein tops of the plurality of bolts are recessed from the top surface in the bolt cavity, wherein the cap assembly includes, a cap member having a first hole and a first portion with a first circumference, a plate member having a second circumference and a second hole, an o-ring disposed between the cap member and plate member, and having a third circumference, and a threaded bolt extending through the first hole and engaged with the second hole, wherein a distance between the cap member and the plate member is adjustable by rotation of the threaded bolt between a first position in which the o-ring is compressed by the cap member and a second position in which the o-ring is not compressed by the cap member and the plate member, the method comprising, inserting the cap member and plate member of the cap assembly into the bolt cavity with the cap assembly in the second position, rotating the threaded bolt to move the cap assembly into the first position such that the o-ring engages with the inside walls of the bolt cavity to secure the cap assembly to the turbine assembly.

[0013] Some example embodiments have cutouts included in at least one of the cap member and plate member. Some embodiments have the first hole extend completely through the cap member. Certain embodiments have the first hole in the cap member threaded. Certain example embodiments have the second hole in the plate member threaded.

[0014] Certain embodiments include a turbine assembly, comprising a turbine that includes: a bolt cavity formed into a top surface of the turbine and having an open end, and a plurality of fins extending from the turbine, a plurality of bolts extending through the turbine for mounting the turbine to a pump rotor, wherein tops of the plurality of bolts are recessed from the top surface in the bolt cavity, and a cap member mounted over and sealing the open end of the bolt cavity. Some embodiments include the turbine assembly further comprising a bolt extending through the cap member, through the bolt cavity, and into the turbine for securing the cap member to the turbine. Certain embodiments have the cap member as a conically shaped upper surface. Certain embodiments have the turbine assembly cap member with a parabolically shaped upper surface.

[0015] Some embodiments include the cap member with a squared shaped upper surface, and some include the cap member with a rounded shaped upper surface. Certain embodiments have the cap member include one or more fins extending from an upper surface thereof. And some embodiments have the cap member include a channel formed into an upper surface thereof. Some embodiments include the cap member with an asymmetrically shaped upper surface. Certain embodiments include the cap member with a bolt hole extending therethrough, through which the bolt extends, and a venting channel extending along the bolt hole. Some embodiments may have the cap member include a vent hole extending therethrough.

BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Fig. 1 is a cross sectional side view of a conventional turbo-molecular pump according to some embodiments herein.

[0017] Fig. 2 is a cross sectional side view of the turbo-molecular pump of the present invention according to some embodiments herein.

[0018] Fig. 3A is a cross sectional side view of the cap member with a parabolic shaped upper surface according to some embodiments herein.

[0019] Fig. 3B is a cross sectional side view of the cap member with a squared shaped upper surface according to some embodiments herein.

[0020] Fig. 3C is a cross sectional side view of the cap member with a rounded shaped upper surface according to some embodiments herein.

[0021] Fig. 4A is a cross sectional side view of the cap member with a fin on its upper surface according to some embodiments herein.

[0022] Fig. 4B is a cross sectional side view of the cap member with a channel on its upper surface according to some embodiments herein.

[0023] Fig. 4C is a cross sectional side view of the cap member with an asymmetric shaped upper surface according to some embodiments herein.

[0024] Fig. 5 A is a cross sectional side view of the cap member with a vent channel along the center bolt aperture according to some embodiments herein.

[0025] Fig. 5B is a cross sectional side view of the cap member with a vent channel extending therethrough according to some embodiments herein.

[0026] Fig. 6 is a cross sectional side view of the cap member with a vent channel extending therethrough without a center bold aperture (i.e. for friction fit) according to some embodiments herein.

[0027] Figs. 7-8 are cross sectional side views of a cap member assembly with a

compressible o-ring for a sealing friction fit according to some embodiments herein.

[0028] Fig. 9 is a cross sectional side view of the cap member with cutouts according to some embodiments herein. DETAILED DESCRIPTION

[0029] The present invention is an improved turbine 30 as illustrated in Fig. 2. Turbine 30 is mounted to a pump rotor 32 via mounting bolts 34. The turbine 30 includes fins 36 used to pump the gasses and suspended particles from the chamber (not shown). The tops of the bolts 34 are recessed from the top surface of the turbine 30 in a bolt cavity 38 that has an open end. A cap member 40 is mounted over and seals the open end of the bolt cavity 38. The cap member 40 is mounted to the turbine via a center bolt 42 with sufficient force to form a seal between cap member 40 and turbine 30. The cap member 40 serves two important functions. First, it prevents particles from settling into the bolt cavity 38, where they could later be expelled back into the chamber, and/or preventing any particles in bolt cavity 38 from being expelled out into the chamber. Second, cap 40 has a shaped upper surface 40a which deflects particles away from the center of the turbine and toward the turbine's fins, so that they can be more effectively evacuated from the chamber. Surface 40a is preferably cone-shaped (conically shaped), which deflects downwardly moving particles outwardly toward the turbine fins.

[0030] The inventive solution can be implemented on existing pumps without having to reconfigure the turbines therein. With the present invention, maintenance intervals can be lengthened due to reduced contamination from the bolt cavity.

[0031] Surface 40a could alternately have a shape other than conical to assist in deflecting particles and/or gasses outwardly, such as a parabolic, squared, or rounded, as illustrated in Figs. 3A-3C, respectively, or any other appropriate convex shape. Additionally, since the cap member 40 is spinning with the turbine 30, particle deflecting features can be formed on the cap's upper surface, such as fins 50, channels 52, or asymmetric convex shapes 54, as illustrated in Figs. 4a- 4C, respectively, to enhance particle deflection as the cap member 40 rotates.

[0032] Optionally, the bolt cavity 38 can be vented, to allow the cavity 38 to evacuate to high vacuum during operation in certain applications. The venting can be achieved by an open or closed channel formed in the cap. Fig. 5 A illustrates a vent channel 60 as part of the center bolt aperture 46 through the cap member 40. Fig. 5B illustrates a vent channel 62 formed through the cap member 40. Fig. 6 illustrates a vent channel 62, without a center bolt aperture (i.e. secured using a friction fit). With this configuration, cap member 40 can be mounted to turbine 30 via a friction fit instead of by center bolt 42. [0033] Figures 7-8 illustrate an example embodiments of cap member 40 with an adjustable friction fit. The cap member 40 includes a plate member 70 (together forming a cap member assembly), where the plate member 70 is dimensioned to fit inside bolt cavity 38. Plate member 70 includes a threaded hole 72 for receiving the center bolt 42. The cap member 40 and plate member 70 have opposing chamfered outer edges 74a and 74b. An o-ring 76 (e.g. made of rubber or other compressible material) is positioned between the cap member 40 and plate member 70. With the bolt 42 loosely engaged between cap member 40 and plate member 70 (e.g. an open position), the plate member 70 is inserted inside bolt cavity 38 until cap member 40 seats on the top surface of turbine 30 (as illustrated in Fig. 8). As the bolt 42 is tightened, the plate 70 is drawn toward cap member 40 to a closed position wherein the chamfered surfaces 74a/74b compress the o-ring 76 against the side surface of the cavity 38. The compressed o-ring 76 forms a seal between cap member 40 and the side surface of the cavity 38, as well as provides a friction fit therebetween to removably secure the cap member 40 to the turbine 30. This design facilities a convenient and reliable way to secure and remove the cap member 40 from turbine 30. This design also avoids the need to use a bolt connection with the turbine 30 (i.e. is compatible with turbines which do not have a threaded hole for engaging with bolt 42).

[0034] Figure 9 illustrates an example embodiment wherein the cap member 40 and plate member 70 include cutouts 96 in various places. These cutouts are shown in exemplary places and depths on both the cap 40 and plate 70 but could be put in at varying depths and angles and places. The example cutouts in Figure 9 are shown as channels in the cap and plate members, but could be any variation of cutout besides a channel. Such example cutouts may save weight on the cap and plate and make them lighter. Such example cutouts could also be used for balancing the cap member assembly. It is to be understood that such cutouts could be used in any embodiment for weight savings and/or balancing purposes.

[0035] In the example embodiment of Figure 9, the bolt 42 is shown inserted from the bottom of the plate 70 and up into the cap member 40 as an example only. In this example, the hole in the cap 40 is threaded and not the hole in the plate. The plate 70 could include the bolt 42 affixed to it, or as a separate part, as shown in Figure 9. In either case, the bolt 42 in this example extends up into the cap member's hole, and not down through the cap and also through into the plate. [0036] Thus, in the example embodiment of Figure 9, there is no bolt hole or recess in the top of the cap member 40. Such an arrangement may provide fewer places for particulates to accumulate when in use. Thus, the cap top in this embodiment is shown with a peak, but could be rounded or squared off, or any kind of shape that would prevent accumulation of particles.

[0037] It is to be understood that the present invention is not limited to the embodiments) described above and illustrated herein. For example, references to the present invention herein are not intended to limit the scope of any claim or claim term, but instead merely make reference to one or more features that may be covered by one or more claims. Materials, processes and numerical examples described above are exemplary only, and should not be deemed to limit the claims.