TURBO MOLECULAR PUMP - SEIKO SEIKI KK

Title:

TURBO MOLECULAR PUMP

Document Type and Number:

WIPO Patent Application WO/1998/032972

Kind Code:

A1

Abstract:

To reduce a loss by exhibiting an exhaust performance to the maximum when a temperature of a rotary vane is within an allowable value, maintain the exhaust performance by suppressing a variation in the number of revolutions of a turbo molecular pump even when a gas load varies, and prevent a thermal deterioration of the rotary vane when a temperature of the rotary vane exceeds the allowable value. A driver output set revolution speed judging unit (5) judges a maximum possible driver output or sets the number of revolutions on the basis of signals from a rotary vane temperature sensor (1), revolution speed sensor (2), motor current sensor (3) and an axial electromagnet current sensor (4) when a temperature of a rotary vane is within an allowable value. A driver output switching unit (6) changes a turbo molecular pump driving output of a motor driver (8) on the basis of a signal from the driver output set revolution speed judging unit (5). Also, a revolution speed compensation unit (7) changes the number of revolutions, at which the turbo molecular pump is driven.

Inventors:

YAMAUCHI AKIRA (JP)

Application Number:

PCT/JP1998/000218

Publication Date:

July 30, 1998

Filing Date:

January 21, 1998

Export Citation:

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Assignee:

SEIKO SEIKI KK (JP)
YAMAUCHI AKIRA (JP)

International Classes:

F04B49/10; F04D19/04; G01K13/08; F04D27/00; F04D27/02; G01J5/00; (IPC1-7): F04D19/04; F04D27/00

Foreign References:

JPH03115796A	1991-05-16
JPH01294995A	1989-11-28
JPH03290092A	1991-12-19
JPH03145598A	1991-06-20
JPH04127894A	1992-04-28
JPH01166293U	1989-11-21
JPH05332288A	1993-12-14

Other References: