Title:
TURBO-MOLECULAR PUMP
Document Type and Number:
WIPO Patent Application WO/2010/038896
Kind Code:
A1
Abstract:
Disclosed is a turbo-molecular pump, wherein in connection with a dimensionless number (X), that is, the ratio between an inter-blade distance (S) of the moving blade of a rotary vane (4B) and the stationary blade of a fixed blade (2B) and a chord length (C), the dimensionless numbers of the outer circumference portion and the inner circumference portion of a first blade stage are designated by Xo(R) and Xi(R), and the dimensionless numbers of the outer circumference portion and the inner circumference portion of a second blade stage are designated by Xo(S) and Xi(S). In the pump, with respect to blade stages adjoining in the direction of the axis of rotation, at least one of the blade stages satisfying a first relation [Xo(R) > Xo(S)] and a second relation [Xi(R) < Xi(S)] is provided. As a result, the turbo-molecular pump can be better improved in a discharge performance, especially in a high-flow range than the existing turbo-molecular pump having the blades designed by the two-dimensional blade section model.
Inventors:
OISHI KOUTA (JP)
Application Number:
PCT/JP2009/067356
Publication Date:
April 08, 2010
Filing Date:
October 05, 2009
Export Citation:
Assignee:
SHIMADZU CORP (JP)
OISHI KOUTA (JP)
OISHI KOUTA (JP)
International Classes:
F04D19/04
Foreign References:
| JPH08247084A | 1996-09-24 | |||
| JP2003013880A | 2003-01-15 |
Other References:
See also references of EP 2341251A4
Attorney, Agent or Firm:
NAGAI, Fuyuki (JP)
Fuyuki Nagai (JP)
Fuyuki Nagai (JP)
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