TURBO-MOLECULAR PUMP

WIPO Patent Application WO/2012/032863

A1

The purpose of the present invention is to enhance the ability of a turbo-molecular pump. A turbo-molecular pump is a compound vacuum pump formed by combining a blade section and screw groove sections. An opening (51) is formed in the joint between a rotor blade holding section (31) which holds rotor blades (5) and a stepped section (72) which holds a rotor tube section (17), and the opening (51) is opened at both the rotor blade holding section (31) and the stepped section (72). A part of gas which is discharged from the blade section is discharged by a screw groove section which comprises the rotor tube section (17) and a stator screw groove (15a). The remaining gas is introduced to the inside of the rotor tube section (17) through the opening (51) and discharged by a screw groove section which comprises the rotor tube section (17) and a stator screw groove (15b). When formed in the joint between the rotor blade holding section (31) and the stepped section (72), the opening (51) can bear stress caused by the rotation of the rotor (4). A groove (61) in which a weight for a balancer is disposed is disposed in a clearance portion located closer to a suction opening than the stator screw groove (15b), and this configuration eliminates the need for reducing the length of the stator screw groove (15b).

SAKAGUCHI YOSHIYUKI (JP)
MIWATA TOORU (JP)
WADA AKIHIKO (JP)

PCT/JP2011/066471

March 15, 2012

July 20, 2011

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EDWARDS JAPAN LTD (JP)
SAKAGUCHI YOSHIYUKI (JP)
MIWATA TOORU (JP)
WADA AKIHIKO (JP)

F04D19/04

JPH0538389U	1993-05-25
JPH046593U	1992-01-21
JPS63147989A	1988-06-20

NAKANO Hitoshi et al. (JP)
Hitoshi Nakano (JP)

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