Title:
TURBO-MOLECULAR PUMP
Document Type and Number:
WIPO Patent Application WO/2022/220197
Kind Code:
A1
Abstract:
[Problem] To provide a turbo-molecular pump in which a gas adsorption object is placed without an increase in the length of an air inlet in an axial direction due to the gas adsorption object. [Solution] This turbo-molecular pump comprises a rotor unit and a stator unit in a casing (external cylinder 127). The turbo-molecular pump also comprises a getter pump unit in the stator unit or the casing, and a heater unit 402 that performs at least one of activation and regeneration of a gas adsorption object 401 in the getter pump unit.
Inventors:
TAKEDA MASAYUKI (JP)
KANETA HIROSHI (JP)
MIZUNO YUKARI (JP)
KANETA HIROSHI (JP)
MIZUNO YUKARI (JP)
Application Number:
PCT/JP2022/017350
Publication Date:
October 20, 2022
Filing Date:
April 08, 2022
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04; F04B37/02
Foreign References:
| JPH02215977A | 1990-08-28 | |||
| JP2004278500A | 2004-10-07 | |||
| JP2008180168A | 2008-08-07 | |||
| JP2010025668A | 2010-02-04 | |||
| JP2018121269A | 2018-08-02 | |||
| JPH02215977B1 |
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