Title:
TURBOMOLECULAR PUMP
Document Type and Number:
WIPO Patent Application WO2002077462
Kind Code:
A3
Abstract:
A turbomolecular pump (10) comprises a stator, a pump rotor, a motor (28) for driving the pump rotor and a control device (42). The control device (42) controls the motor output as to prevent the motor output from exceeding a permissible motor maximum output. Stator-side temperature sensors (32-38), which are provided for measuring the stator temperature, are arranged on the turbomolecular pump (10). The control device (42) comprises a maximum output determining device (50), that establishes the permissible motor maximum output according to the measured stator temperature. The permissible motor maximum output is thus not set to a constant value, but is always determined according to the stator temperature. This results in the power of the motor being fully exploited as long as the measured stator temperature is less than a maximum value.
Inventors:
BLUMENTHAL ROLAND (DE)
ODENDAHL HEINZ-DIETER (DE)
BOHRY DIETER (DE)
ODENDAHL HEINZ-DIETER (DE)
BOHRY DIETER (DE)
Application Number:
PCT/EP2002/002884
Publication Date:
December 12, 2002
Filing Date:
March 15, 2002
Export Citation:
Assignee:
LEYBOLD VAKUUM GMBH (DE)
BLUMENTHAL ROLAND (DE)
ODENDAHL HEINZ-DIETER (DE)
BOHRY DIETER (DE)
BLUMENTHAL ROLAND (DE)
ODENDAHL HEINZ-DIETER (DE)
BOHRY DIETER (DE)
International Classes:
F04D19/04; F04D27/00; F04D29/00; (IPC1-7): F04D19/04
Foreign References:
| EP0967394A1 | 1999-12-29 | |||
| US6123522A | 2000-09-26 | |||
| DE2757599A1 | 1979-06-28 |
Download PDF:
Previous Patent: WATER-INJECTED VOLUMETRIC COMPRESSOR
Next Patent: DEVICE FOR TELECONTROLLING A FUNCTION OF DRIVES
Next Patent: DEVICE FOR TELECONTROLLING A FUNCTION OF DRIVES