Title:
TURBOMOLECULAR VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/1989/009341
Kind Code:
A1
Abstract:
A turbomolecular vacuum pump comprises a hollow stator (1) in which is mounted a hollow rotor (3) between which are located channels (3, 4) of the turbomolecular and molecular gas-pumping stages connected to the atmosphere through additional and main dynamic sealing channels (34, 36) formed by grooves made on areas (35, 37) of the internal surface of the rotor (2) and by the external surface of the shaft (14) of the rotor (2) shaped as a multiple-thread having a rectangular profile, as well as by the surfaces of the rotor (2) and of a bearing (16), which face, respectively, the areas (37, 35), the bearing (16) being located inside the hollow rotor (2) in which is mounted one end of the shaft (14) of the rotor (2).
Inventors:
SERGEEV VLADIMIR PAVLOVICH (SU)
SHOLOKHOV VALERY BORISOVICH (SU)
VIKHREV VLADIMIR ILIICH (SU)
SHARSHIN SERGEI NIKOLAEVICH (SU)
SHOLOKHOV VALERY BORISOVICH (SU)
VIKHREV VLADIMIR ILIICH (SU)
SHARSHIN SERGEI NIKOLAEVICH (SU)
Application Number:
PCT/SU1988/000076
Publication Date:
October 05, 1989
Filing Date:
March 30, 1988
Export Citation:
Assignee:
SERGEEV VLADIMIR P (SU)
SHOLOKHOV VALERY B (SU)
VIKHREV VLADIMIR I (SU)
SHARSHIN SERGEI N (SU)
SHOLOKHOV VALERY B (SU)
VIKHREV VLADIMIR I (SU)
SHARSHIN SERGEI N (SU)
International Classes:
F04D29/10; F04D19/04; F16J15/40; (IPC1-7): F04D19/04
Foreign References:
| DE3613344A1 | 1987-10-22 | |||
| EP0081890B1 | 1985-10-09 | |||
| DE2255618C2 | 1982-12-23 | |||
| FR2244370A5 | 1975-04-11 |
Download PDF: