Title:
TWO-DIMENSIONAL IMAGE DETECTOR AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2006/115099
Kind Code:
A1
Abstract:
[PROBLEMS] To manufacture a two-dimensional image detector, which is uniform with less defects and has high reliability, at a high yield. [MEANS FOR SOLVING PROBLEMS] In the two-dimensional image detector, an active matrix substrate, which includes a pixel arranged layer and a switching element, is connected with a facing substrate, which includes a radiation transformation film, by bump electrodes formed of a conductive paste which does not require temperature change for hardening by screen printing. [EFFECTS] The bump electrodes are extremely easily arranged at equivalent pitches over a large area, and generation of warpage and cracks of the substrate due to thermal expansion can be suppressed. Therefore, the high quality two-dimensional image detector having no defect due to adjacent bump deposition can be manufactured at a high yield.
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Inventors:
TOKUDA SATOSHI (JP)
KISHIHARA HIROYUKI (JP)
KISHIHARA HIROYUKI (JP)
Application Number:
PCT/JP2006/308060
Publication Date:
November 02, 2006
Filing Date:
April 17, 2006
Export Citation:
Assignee:
SHIMADZU CORP (JP)
TOKUDA SATOSHI (JP)
KISHIHARA HIROYUKI (JP)
TOKUDA SATOSHI (JP)
KISHIHARA HIROYUKI (JP)
International Classes:
H01L27/146; G01T1/24; H01L27/14
Foreign References:
JP2000294759A | 2000-10-20 | |||
JPH11287862A | 1999-10-19 | |||
JP2000208749A | 2000-07-28 | |||
JP2000188386A | 2000-07-04 | |||
JP2000156487A | 2000-06-06 | |||
JPS61207025A | 1986-09-13 |
Attorney, Agent or Firm:
Kita, Toshifumi c/o SHIMADZU CORPORATION (1 Nishinokyo-kuwabaracho, Nakagyo-k, Kyoto-shi Kyoto, JP)
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