Title:
TWO DIMENSIONAL SPATIAL LIGHT MODULATOR
Document Type and Number:
WIPO Patent Application WO2005059596
Kind Code:
A3
Abstract:
A spatial light modulator is provided having a two-dimensional (2D), close-packed MEMS (Micro-Electromechanical System) array of diffractive pixels. Each pixel (320) includes a number of diffractive elements or diffractors. Each diffractor includes a tent member (102) disposed above and spaced apart from an upper surface of a substrate, a movable actuator (300) disposed between the substrate and the tent member (102), and a driver moving the actuator (300). The tent member (102) has a first planar light reflective surface facing away from the substrate, the first planar light reflective surface having an aperture (104) formed therein. The actuator (300) has a second planar light reflective surface (302) parallel to and potentially coplanar with the first planar light reflective surface and positioned relative to the aperture to receive light passing therethrough. The aperture (104) may be sized and shaped to define an area with reflectivity substantially equal to the reflectivity of an area of the first planar light reflective surface surrounding the aperture (104) to provide a maximum contrast ratio.
Inventors:
PAYNE ALEXANDER P (US)
TRISNADI JAHJA I (US)
TRISNADI JAHJA I (US)
Application Number:
PCT/US2004/041216
Publication Date:
May 04, 2006
Filing Date:
December 09, 2004
Export Citation:
Assignee:
SILICON LIGHT MACHINES CORP (US)
PAYNE ALEXANDER P (US)
TRISNADI JAHJA I (US)
PAYNE ALEXANDER P (US)
TRISNADI JAHJA I (US)
International Classes:
F21L4/00; G02B26/08; G02B
Foreign References:
| US6268948B1 | 2001-07-31 |
Other References:
See also references of EP 1692550A4
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