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Title:
TWO-SIDED IN-SITU MEASUREMENT SYSTEM AND METHOD FOR CHARGE DISTRIBUTION IN THIN DIELECTRIC FILM
Document Type and Number:
WIPO Patent Application WO/2020/239002
Kind Code:
A1
Abstract:
A two-sided in-situ measurement system and method for charge distribution in a thin dielectric film. The two-sided in-situ measurement system comprises a sample under test (10), a pulsed laser (1), a photoelectric trigger circuit, a two-sided measurement light path, a voltage application circuit, and a measurement circuit. Laser light generated by the pulsed laser (1) is divided into two parts, and the two parts respectively enter the photoelectric trigger circuit and the two-sided measurement light path. The two-sided measurement light path divides the laser into two parts, and the two parts respectively enter a front surface coating electrode (11) and a rear surface coating electrode (12). The voltage application circuit comprises a direct current high voltage source, which applies a voltage to the rear surface coating electrode (12) of the thin dielectric film via a current limiting resistor. The rear surface coating electrode (12) is further connected to a moving end of a single-pole two-throw switch via a coupling capacitor, and two fixed ends thereof are respectively connected to ground and a protection circuit. The protection circuit is connected to the measurement circuit. The front surface coating electrode (11) is grounded. Compared with the prior art, the provided technical solution solves the problem of thermal pulse methods in which resolution decreases in a light incident direction, and improves the spatial resolution of measurement overall.

Inventors:
ZHENG FEIHU (CN)
XIE JIAO (CN)
ZHANG YEWEN (CN)
Application Number:
PCT/CN2020/092809
Publication Date:
December 03, 2020
Filing Date:
May 28, 2020
Export Citation:
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Assignee:
UNIV TONGJI (CN)
International Classes:
G01R29/24
Foreign References:
CN110244138A2019-09-17
CN109557129A2019-04-02
CN1551309A2004-12-01
CN103412197A2013-11-27
JP2000046884A2000-02-18
JPH11231005A1999-08-27
CN105629085A2016-06-01
US5723982A1998-03-03
Other References:
BERND PLOSS ET AL.: "Thermal Wave probing of pyroelectric distributions in the surface region of ferroelectric materials: A new method for the analysis", JOURNAL OF APPLIED PHYSICS, vol. 11,, no. 72, 4 June 1998 (1998-06-04), XP000323876, ISSN: 0021-8979, DOI: 20200824182230Y
ZHIEN ZHU ET AL.: "Methodological investigation on photo-stimulated discharge to obtain accurate trap information in polymer dielectrics", MEASUREMENT SCIENCE AND TECHNOLOGY, no. 22, 15 July 2011 (2011-07-15), XP020208755, ISSN: 1361-6501, DOI: 20200824181834Y
Attorney, Agent or Firm:
FANG & ASSOCIATES (CN)
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