Title:
TWO-STAGE INDIRECT SEATING STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2019/116480
Kind Code:
A1
Abstract:
A two-stage indirect seating structure for performing assessment using air leakage with the movement of a rod that is placed in contact with a workpiece, the structure comprising: a first operation chamber and a second operation chamber, which are in a chuck unit that grips a workpiece with multiple chuck claws and which are formed consecutively in the direction that faces the workpiece; a first piston member, which is inserted in the first operation chamber so that a rod part protrudes to the outside of the chuck unit; a second piston member, which is inserted in the second operation chamber so that a rod part is pressed against the first piston member and in which a through hole is formed in the axial direction; a biasing member, which is inserted in the second operation chamber and is for biasing the second piston member toward the first piston member; and an air flow channel that connects from the second operation chamber to the through hole of the second piston member and an open hole formed in the first operation chamber on the side of a pressurizing part that pressurizes the first piston member.
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Inventors:
INO SHIGEYUKI (JP)
MIZUTANI DAISUKE (JP)
AKATSU NORITAKA (JP)
MIZUTANI DAISUKE (JP)
AKATSU NORITAKA (JP)
Application Number:
PCT/JP2017/044810
Publication Date:
June 20, 2019
Filing Date:
December 14, 2017
Export Citation:
Assignee:
FUJI CORP (JP)
International Classes:
B23Q17/00; B23B31/00
Foreign References:
| JP2017042860A | 2017-03-02 | |||
| JP2008006543A | 2008-01-17 | |||
| JP2004122305A | 2004-04-22 | |||
| JP2011143531A | 2011-07-28 |
Attorney, Agent or Firm:
HIROTA Akihiro (JP)
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