Title:
ULTRA-LOW POWER MAGNETOELECTRIC MAGNETIC FIELD SENSOR
Document Type and Number:
WIPO Patent Application WO/2018/226284
Kind Code:
A3
Abstract:
A high-sensitivity and ultra-low power consumption magnetic sensor using a magnetoelectric (ME) composite comprising of magnetostrictive and piezoelectric layers. This sensor exploits the magnetically driven resonance shift of a free-standing magnetoelectric micro-beam resonator. Also disclosed is the related method for making an on-chip micro-resonator magnetic sensor.
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Inventors:
FINKEL PETER (US)
BENNETT STEVEN (US)
STARUCH MARGO (US)
BUSSMANN KONRAD (US)
BALDWIN JEFFREY (US)
MATIS BERNARD (US)
LACOMB RONALD (US)
ZAPPONE WILLIAM (US)
LACOMB JULIE (US)
METZLER MEREDITH (US)
GOTTRON NORMAN (US)
BENNETT STEVEN (US)
STARUCH MARGO (US)
BUSSMANN KONRAD (US)
BALDWIN JEFFREY (US)
MATIS BERNARD (US)
LACOMB RONALD (US)
ZAPPONE WILLIAM (US)
LACOMB JULIE (US)
METZLER MEREDITH (US)
GOTTRON NORMAN (US)
Application Number:
PCT/US2018/022145
Publication Date:
February 14, 2019
Filing Date:
March 13, 2018
Export Citation:
Assignee:
US GOV SEC NAVY (US)
UNIV CARNEGIE MELLON (US)
UNIV CARNEGIE MELLON (US)
International Classes:
G01R33/032; G01R33/00; G01R33/18
Domestic Patent References:
WO2004070408A1 | 2004-08-19 |
Foreign References:
US20160003924A1 | 2016-01-07 | |||
US20070252593A1 | 2007-11-01 | |||
US9383208B2 | 2016-07-05 | |||
JP2010145147A | 2010-07-01 |
Other References:
See also references of EP 3596482A4
Attorney, Agent or Firm:
BROOME, Kerry, L. (US)
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