ULTRA-SMALL HIGH-SENSITIVITY MAGNETIC SENSOR

Title:

ULTRA-SMALL HIGH-SENSITIVITY MAGNETIC SENSOR

Document Type and Number:

WIPO Patent Application WO/2019/017066

Kind Code:

A1

Abstract:

In order to provide an ultra-small high-sensitivity magnetic sensor that includes a magnetic field detection element formed integrally with an ASIC, the present invention is configured such that the thickness of a substrate film (10b) formed on the upper surface of an insulating protective film (10a) of an ASIC (4) is set to 1-20 µm, a groove (11) having a depth of 1-10 µm is formed in the substrate film (10b), an element (1) is formed along the groove (11) surface so as to partially or entirely bury a coil, an electrode of the element (1) and an electrode of the ASIC (4) are electrically connected via a through-hole type electrode joining part that penetrates the insulating protective film (10a) and the substrate film (10b), and the thickness of the portion of the element from the surface of the ASIC (4) is set not more than 20 µm.

Inventors:

HONKURA YOSHINOBU (JP)
HONKURA SHINPEI (JP)
KUDO KAZUE (JP)
TANABE JUNICHI (JP)
KIKUCHI EIKI (JP)

Application Number:

PCT/JP2018/019705

Publication Date:

January 24, 2019

Filing Date:

May 22, 2018

Export Citation:

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Assignee:

ASAHI INTECC CO LTD (JP)

International Classes:

G01R33/02; H01L43/00

Foreign References:

JP5839527B1	2016-01-06
US20060202291A1	2006-09-14
JP2009503443A	2009-01-29
EP2813859A1	2014-12-17
JP2014153309A	2014-08-25
US9577185B1	2017-02-21
JP2005147998A	2005-06-09
JP2003167037A	2003-06-13
JPH03156391A	1991-07-04
JP6256962B1	2018-01-10
JPS583975A	1983-01-10
JP2015134166A	2015-07-27
JP2017012840A	2017-01-19
JP2014153309A	2014-08-25
JP2014042055A	2014-03-06

Other References: