Title:
ULTRA-SMOOTH PLANARIZATION POLISHING METHOD AND APPARATUS
Document Type and Number:
WIPO Patent Application WO/2022/261998
Kind Code:
A1
Abstract:
The present invention relates to an ultra-smooth planarization polishing method and apparatus. The apparatus comprises a base, a Z-axis driving mechanism, a revolution driving mechanism, an autorotation driving mechanism, a dynamic magnetic field generating mechanism, a deflection driving mechanism, and a polishing disc used for containing a magnetorheological fluid. The Z-axis driving mechanism is mounted on the base; an output end of the Z-axis driving mechanism is connected to the revolution driving mechanism; an output end of the revolution driving mechanism is connected to the autorotation driving mechanism; a clamping disc used for clamping a workpiece is provided at an output end of the autorotation driving mechanism; the polishing disc is fixed on the base and is located below the revolution driving mechanism and the autorotation driving mechanism; the dynamic magnetic field generating mechanism is provided below the polishing disc, and a dynamic magnetic field is formed in the polishing disc; the deflection driving mechanism is mounted on the base; and the dynamic magnetic field generating mechanism is connected to an output end of the deflection driving mechanism. The present invention effectively avoids the problem that a machining effect difference exists between the center and edge of a workpiece due to the fact that a linear speed zero point exists at the center of the workpiece.
Inventors:
PAN JISHENG (CN)
YAN QIUSHENG (CN)
CAI ZHIHANG (CN)
HONG ZHIQING (CN)
CHEN HAIYANG (CN)
LIANG ZHIBIN (CN)
YAN QIUSHENG (CN)
CAI ZHIHANG (CN)
HONG ZHIQING (CN)
CHEN HAIYANG (CN)
LIANG ZHIBIN (CN)
Application Number:
PCT/CN2021/101915
Publication Date:
December 22, 2022
Filing Date:
June 23, 2021
Export Citation:
Assignee:
UNIV GUANGDONG TECHNOLOGY (CN)
GUANGDONG NANOGRIND TECH CO LTD (CN)
GUANGDONG NANOGRIND TECH CO LTD (CN)
International Classes:
B24B31/112; B24B1/00; B24B31/12; H01L21/304
Foreign References:
| CN109926873A | 2019-06-25 | |||
| CN110524317A | 2019-12-03 | |||
| CN204935272U | 2016-01-06 | |||
| CN105328516A | 2016-02-17 | |||
| CN212444365U | 2021-02-02 | |||
| US5449313A | 1995-09-12 |
Attorney, Agent or Firm:
YOGO PATENT AND TRADEMARK AGENCY LIMITED COMPANY (CN)
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